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ZnO nanoparticles produced by novel reactive physical deposition process

机译：通过新型反应性物理沉积工艺生产的ZnO纳米颗粒

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摘要

This paper reports the deposition of ZnO nanoparticles with controlled sizes and different particle densities and their structural, composition and optical properties. They were deposited by means of a DC magnetron based vacuum nanoparticle source onto different substrates (GaAs, Si and Ti/SiO_2/Si). We believe that this is the first time that such nanoparticles have been produced using this unique technique. Zinc was used as sputtering target to produce zinc nanoparticles which were oxidized in-line using molecular oxygen. The structural properties and chemistry of the ZnO were studied by transmission electron microscopy. An average particle size of 6(±2)nm was produced with uniform size distribution. The particle density was controlled using a quartz crystal monitor. Surface densities of 2.3 × 10~(11)/cm~2, 1.1 × 10~(13)/cm~2 and 3.9 × 10~(13)/cm~2 were measured for three different deposition runs. The ZnO particles were found to be single crystalline having hexagonal structure. Photoluminescence measurements of all samples were performed at room temperature using a cw He-Cd laser at 325 nm excitation. The UV emission around 375 nm at room temperature is due to excitonic recombination and the broad emission centered at 520 nm may be attributed to intrinsic point defects such as oxygen interstitials.
机译：本文报道了具有受控大小和不同颗粒密度的ZnO纳米颗粒的沉积及其结构，组成和光学性质。借助于基于直流磁控管的真空纳米颗粒源将它们沉积到不同的衬底（GaAs，Si和Ti / SiO_2 / Si）上。我们相信这是首次使用这种独特技术生产出此类纳米颗粒。锌被用作溅射靶以生产锌纳米颗粒，其被分子氧在线氧化。通过透射电子显微镜研究了ZnO的结构性质和化学性质。产生的平均粒径为6（±2）nm，粒径分布均匀。使用石英监测仪控制颗粒密度。在三种不同的沉积过程中，测得的表面密度分别为2.3×10〜（11）/cm~2、1.1×10〜（13）/ cm〜2和3.9×10〜（13）/ cm〜2。发现ZnO颗粒是具有六边形结构的单晶。使用cw He-Cd激光器在325 nm激发下，在室温下对所有样品进行光致发光测量。室温下375 nm附近的紫外线发射是由于激子复合引起的，而集中在520 nm处的宽发射可能归因于固有点缺陷，例如氧间隙。

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  • 来源
    《Applied Surface Science》 |2011年第12期|p.5366-5369|共4页
  • 作者

    P. Thangadurai; I. Zergioti; S. Saranu; C. Chandrinou; Z. Yang; D. Tsoukalas; A. Kean; N. Boukos;

  • 作者单位

    Institute ofMaterials Science, National Center for Scientific Research-'Vemokritos', Aghia Paraskevi, 15310 Athens, Greece;

    Department of Physics, National Technical University of Athens, 15780 Zografou, Athens, Greece;

    Mantis Deposition Ltd., Goodson Industrial Mews, Wellington Street, Thame, Oxfordshire, 0X9 3BX, United Kingdom;

    Institute ofMaterials Science, National Center for Scientific Research-'Vemokritos', Aghia Paraskevi, 15310 Athens, Greece;

    Department of Physics, National Technical University of Athens, 15780 Zografou, Athens, Greece;

    Department of Physics, National Technical University of Athens, 15780 Zografou, Athens, Greece;

    Mantis Deposition Ltd., Goodson Industrial Mews, Wellington Street, Thame, Oxfordshire, 0X9 3BX, United Kingdom;

    Institute ofMaterials Science, National Center for Scientific Research-'Vemokritos', Aghia Paraskevi, 15310 Athens, Greece;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    zno particles; photoluminescence;

    机译：氧化锌颗粒;光致发光;

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