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首页> 外文期刊>Applied Surface Science >Deformation and fracture of TiN coating on a Si(111) substrate during nanoindentation
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Deformation and fracture of TiN coating on a Si(111) substrate during nanoindentation

机译：纳米压痕过程中Si（111）衬底上TiN涂层的变形和断裂

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摘要

The deformation mechanisms and fracture behavior of TiN coating on a Si(111) substrate, deposited using magnetron sputtering Ti target, is characterized by nanoindentation experiments. The morphologies of the indentations are revealed by scanning electron microscopy, coupled with in situ atomic force microscopy in nanoindentation experiments. The results show that permanent trigonal impressions and radial plastic grooves are confined within the contact regions even though the peak indenter displacement increases to 1500nm. Local cracks of TiN appear around the indent marks making the edges of the indentations irregular. The cracks increase with an increase of the indenter displacement until the indenter arrives at (or approaches) the Si(111) substrate at a critical displacement. As the peak indenter displacement increases to 2500 nm, an interfacial fracture between the TiN coating and the Si(111) substrate is observed using both scanning electron microscopy micrograph and in situ atomic force microscopy images. The diameter of the interfacial fracture determined by scanning electron microscopy micrographs is more accurate than that determined by in situ atomic force microscopy images in nanoindentation experiments. The failure mechanism of the TiN coating is also investigated by means of a standard nanoscratch test.
机译：通过纳米压痕实验，表征了磁控溅射Ti靶在Si（111）衬底上沉积TiN涂层的变形机理和断裂行为。压痕的形态通过扫描电子显微镜和纳米压痕实验中的原位原子力显微镜揭示。结果表明，即使峰值压头位移增加到1500nm，永久的三角压痕和径向的塑料凹槽也被限制在接触区域内。 TiN的局部裂纹出现在凹痕周围，从而使凹痕的边缘不规则。裂纹随着压头位移的增加而增加，直到压头以临界位移到达（或接近）Si（111）衬底为止。当峰值压头位移增加到2500 nm时，使用扫描电子显微镜显微图像和原位原子力显微镜图像均可观察到TiN涂层与Si（111）衬底之间的界面断裂。在纳米压痕实验中，通过扫描电子显微镜显微照片确定的界面骨折直径比通过原位原子力显微镜图像确定的直径更精确。还通过标准的纳米划痕试验研究了TiN涂层的失效机理。

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  • 来源
    《Applied Surface Science》 |2011年第17期|p.7475-7480|共6页
  • 作者

    T.An; L.L Wang; H.W.Tian; M.Wen; W.T.Zheng;

  • 作者单位

    College of Science, Changchun University, Changchun 130022, PR China,Department of Materials Science, and Key Laboratory of Automobile Materials of MOE Jilin University, Qianjin Street 2699, Changchun, Jiiin 130012, PR China;

    College of Science, Changchun University, Changchun 130022, PR China;

    Department of Materials Science, and Key Laboratory of Automobile Materials of MOE Jilin University, Qianjin Street 2699, Changchun, Jiiin 130012, PR China;

    Department of Materials Science, and Key Laboratory of Automobile Materials of MOE Jilin University, Qianjin Street 2699, Changchun, Jiiin 130012, PR China;

    Department of Materials Science, and Key Laboratory of Automobile Materials of MOE Jilin University, Qianjin Street 2699, Changchun, Jiiin 130012, PR China;

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  • 正文语种 eng
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  • 关键词

    tin coating; nanoindentation; nanoscratch; cube corner indenter; radial crack; interfacial fracture;

    机译：锡涂层;纳米压痕纳米划痕立方角压头;径向裂纹界面断裂;

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