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首页> 外文期刊>Applied Surface Science >Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method
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Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method

机译：离子束溅射沉积法在玻璃和粘土基底上制备纳米晶ITO薄膜并表征

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摘要

Nanocrystalline indium tin oxide (ITO) thin films were prepared on clay-1 (Clay-TPP-LP-SA), clay-2 (Clay-TPP-SA) and glass substrates using ion-beam sputter deposition method. X-ray diffraction (XRD) patterns showed that the as-deposited ITO films on both clay-1 and clay-2 substrates were a mixture of amorphous and polycrystalline. But the as-deposited ITO films on glass substrates were polycrystalline. The surface morphologies of as-deposited ITO/glass has smooth surface; in contrast, ITO/clay-1 has rough surface. The surface roughnesses of ITO thin films on glass and clay-1 substrate were calculated as 4.3 and 83 nm, respectively. From the AFM and SEM analyses, the particle sizes of nanocrystalline ITO for a film thickness of 712 nm were calculated as 19.5 and 20 nm, respectively. Optical study showed that the optical transmittance of ITO/clay-2 was higher than that of ITO/day-l. The sheet resistances of as-deposited ITO/clay-1 and ITO/clay-2 were calculated as 76.0 and 63.0 Ω/□, respectively. The figure of merit value for as-deposited ITO/clay-2 (12.70 x 10~(-3)/Ω)was also higher than that of ITO/clay-1 (9.6x 10~(-3)/Ω), respectively. The flexibilities of ITO/clay-1 and ITO/clay-2 were evaluated as 13 and 12 mm, respectively. However, the ITO-coated clay-2 substrate showed much better optical and electrical properties as well as flexibility as compared to clay-1.
机译：使用离子束溅射沉积法在粘土-1（Clay-TPP-LP-SA），粘土-2（Clay-TPP-SA）和玻璃基板上制备了纳米晶铟锡氧化物（ITO）薄膜。 X射线衍射（XRD）图谱显示，在clay-1和clay-2基材上沉积的ITO膜是非晶和多晶的混合物。但是在玻璃基板上沉积的ITO膜是多晶的。沉积后的ITO /玻璃的表面形貌具有光滑的表面。相反，ITO / clay-1具有粗糙的表面。计算出在玻璃和粘土-1基底上的ITO薄膜的表面粗糙度分别为4.3和83 nm。根据AFM和SEM分析，计算出纳米晶体ITO的膜厚712 nm的粒径分别为19.5和20 nm。光学研究表明，ITO / clay-2的透光率高于ITO / day-1。沉积后的ITO / clay-1和ITO / clay-2的薄层电阻分别计算为76.0和63.0Ω/□。沉积后的ITO / clay-2的品质因数（12.70 x 10〜（-3）/Ω）也高于ITO / clay-1的品质因数（9.6x 10〜（-3）/Ω），分别。 ITO / clay-1和ITO / clay-2的柔韧性分别为13和12 mm。但是，与粘土-1相比，涂有ITO的粘土2基材显示出更好的光学和电学性能以及柔韧性。

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