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Indium Tin Oxide Sol-Gel Precursor Conversion Process Using The Third Harmonics Of Nd:YAG Laser

机译:Nd:YAG激光三次谐波的氧化铟锡溶胶-凝胶前体转化工艺

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摘要

We use the third harmonics of Nd:YAG laser (X =355nm) for simultaneous precursor conversion and dopant activation on sol-gel ITO thin films at a laser fluence range of 700-1000 mj/cm2. A minimum resistivity of 5.37 x 10~~2Ω-cm with a corresponding carrier concentration of 6 x 10~(19) cm~(-3) is achieved at laser irradiation fluence of 900mJ/cm~2 X-ray photoelectron analysis reveals that extremely high tin concentration of 19.4 at.% and above is presented in the laser-cured ITO thin films compared with 8.7 at.% in the 500 °C thermally cured counterpart. These excess tin-ions form complex defects, which contribute no free carriers but act as scattering centers, causing inferior electrical properties of the laser-cured films in comparison with the thermally cured ones.
机译:我们使用Nd:YAG激光(X = 355nm)的三次谐波在700-1000 mj / cm2的激光注量范围上同时进行前体转化和sol-gel ITO薄膜上的掺杂剂活化。在900mJ / cm〜2的激光辐照通量下,获得的最小电阻率为5.37 x 10 ~~2Ω-cm,相应的载流子浓度为6 x 10〜(19)cm〜(-3)。X射线光电子分析表明:激光固化的ITO薄膜呈现出19.4 at。%或更高的极高锡浓度,而500°C的热固化对应物则为8.7 at。%。这些过量的锡离子形成复杂的缺陷,其不产生自由载流子而是充当散射中心,与热固化的薄膜相比,导致激光固化的薄膜的电性能较差。

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  • 来源
    《Applied Surface Science》 |2011年第23期|p.10042-10044|共3页
  • 作者单位

    Institute of Applied Mechanics, National Taiwan University, No. 1 Sec. 4 Roosevelt Rd., Taipei 10617, Taiwan;

    Dept. of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan;

    Dept. of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan;

    Dept. of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan;

    Dept. of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Sol-gel; Laser curing; Indium tin oxide;

    机译:溶胶-凝胶;激光固化;氧化铟锡;

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