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首页> 外文期刊>Applied Surface Science >Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings
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Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings

机译：高温退火对类金刚石碳和TiAlSiCN纳米复合涂层结构，硬度和摩擦学性能的影响

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摘要

Diamond-like carbon (DLC) and TiAlSiCN nanocomposite coatings were synthesized and annealed at different temperatures in a vacuum environment. The microstructure, hardness and tribological properties of as-deposited and annealed DLC-TiAlSiCN nanocomposite coatings were characterized by X-ray diffraction, X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), Raman spectroscopy, nano-indentation and friction tests. The TEM results reveal that the as-deposited DLC-TiAlSiCN coating has a unique nanocomposite structure consisting of TiCN nanocrystals embedded in an amorphous matrix consisting of a-Si_3N_4, a-SiC, a-CN and DLC, and the structure changed little after annealing at 800 ℃. However, XPS and Raman results show that an obvious graphitization of the DLC phase occurred during the annealing process and it worsened with annealing temperature. Because of the graphitization, the hardness of the DLC-TiAlSiCN coating after annealing at 800 ℃ decreased from 45 to 36 GPa. In addition, the DLC-TiAlSiCN coating after annealing at 800 ℃ has a similar friction coefficient to the as-deposited coating.
机译：合成了类金刚石碳（DLC）和TiAlSiCN纳米复合涂层，并在真空环境中的不同温度下进行了退火。通过X射线衍射，X射线光电子能谱（XPS），透射电子显微镜（TEM），拉曼光谱，纳米压痕和摩擦来表征沉积和退火的DLC-TiAlSiCN纳米复合涂层的微观结构，硬度和摩擦学性能。测试。 TEM结果表明，沉积后的DLC-TiAlSiCN涂层具有独特的纳米复合结构，该结构由TiCN纳米晶体组成，该晶体嵌入在由a-Si_3N_4，a-SiC，a-CN和DLC组成的非晶基质中，退火后结构几乎没有变化。在800℃。然而，XPS和Raman结果表明，在退火过程中DLC相出现了明显的石墨化，并且随着退火温度的升高而恶化。由于石墨化，在800℃退火后DLC-TiAlSiCN涂层的硬度从45 GPa降低到36 GPa。另外，在800℃退火后的DLC-TiAlSiCN涂层具有与沉积后的涂层相似的摩擦系数。

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  • 来源
    《Applied Surface Science》 |2011年第3期|p.1206-1211|共6页
  • 作者

    Z.W. Xie; L.P. Wang; X.F. Wang; L Huang; Y. Lu; J.C. Yan;

  • 作者单位

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

    State Key Laboratory of Advanced Welding & Joining, Harbin Institute of Technology, Harbin 150001, China;

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  • 正文语种 eng
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  • 关键词

    diamond-like carbon; TIALSICN; nanocomposite; annealing; structure; hardness;

    机译：类金刚石碳;TIALSICN;纳米复合材料退火;结构体;硬度;

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