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首页> 外文会议>STLE/ASME Joint International Tribology Conference >The effects of annealing treatment on the nano-mechanical properties and nano-tribological behaviors of nitrogen-doped diamond-like carbon (DLC) coatings
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The effects of annealing treatment on the nano-mechanical properties and nano-tribological behaviors of nitrogen-doped diamond-like carbon (DLC) coatings

机译：退火处理对氮掺杂金刚石状碳（DLC）涂层纳米机械性能和纳米摩擦学性能的影响

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Diamond-like carbon (DLC) coatings doped with different nitrogen contents were prepared by an ECWR-CVD deposition technique and vacuum-annealed at different temperatures. The structures, nano-mechanical properties and nano-tribological behaviors of the annealed coatings were characterized using Laser Raman Spectroscopic technique and Hysitron Triboindenter, respectively. The annealing temperature promotes the increase in the sp2 ratio and decreases evidently the nano-mechanical properties, including nano-hardness and reduced modulus. For the as-deposited DLC coatings with different nitrogen contents, the frictional coefficients (L{sub}F/N{sub}F) deduced from nano-scratch testing at same loads are similar, and, therefore, seem to be independent of the added nitrogen content. However, Annealing treatment has a significant effect on the frictional coefficient for the N-doped DLC coatings. In addition, the increasing extent of the frictional coefficient with the annealing temperature for the annealed N-doped DLC coatings varies depending on the nitrogen content in the coatings.
机译：通过ECWR-CVD沉积技术掺杂有不同氮含量的金刚石状碳（DLC）涂层并在不同温度下真空退火。使用激光拉曼光谱技术和Hysitron Fridoindenter分别表征退火涂层的结构，纳米机械性能和纳米摩擦学行为。退火温度促进SP2比的增加，并且显着降低了纳米机械性能，包括纳米硬度和减少的模量。对于具有不同氮含量的沉积DLC涂层，在相同负载下从纳米划痕测试推导的摩擦系数（L {Sub} F / N {Sub} F）是相似的，因此似乎独立于添加氮含量。然而，退火处理对N掺杂DLC涂层的摩擦系数具有显着影响。另外，随着退火的N掺杂DLC涂层的退火温度的摩擦系数的增加程度根据涂层中的氮含量而变化。

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