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首页> 外文期刊>Journal of Materials Science >Nano-mechanical properties and nano-tribological behaviors of nitrogen-doped diamond-like carbon (DLC) coatings
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Nano-mechanical properties and nano-tribological behaviors of nitrogen-doped diamond-like carbon (DLC) coatings

机译：氮掺杂类金刚石碳（DLC）涂层的纳米力学性能和纳米摩擦学行为

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摘要

Diamond-like carbon (DLC) coatings doped with different nitrogen contents were prepared by an ECWR-CVD deposition technique, and their chemical compositions, nano-mechanical properties and nano-tribological behaviors were characterized using Auger Electron Spectrometer and Hysitron Triboindenter, respectively. The results have shown that, higher nitrogen contents in the N-doped DLC coatings can be obtained by increasing the N2 flow rate in the reactive gas mixture. The nitrogen addition in the DLC coatings decreases evidently the nano-mechanical properties, including nano-hardness and reduced modulus. In addition, the depths for the scratched tracks produced during the scratch testing depend heavily on the nitrogen content in the N-doped DLC coatings, and, at the same applied loads, the higher the doped nitrogen content, the deeper the resulting scratched tracks. For the DLC coatings doped with different nitrogen contents, however, the frictional coefficients (LF/INF) deduced from nano-scratch testing at same loads are similar, and, therefore, seem to be independent of the added nitrogen content.
机译：采用ECWR-CVD沉积技术制备了不同氮含量掺杂的类金刚石碳（DLC）涂层，并分别使用俄歇电子能谱仪和Hysitron Triboindenter表征了它们的化学组成，纳米力学性能和纳米摩擦学行为。结果表明，通过增加反应性气体混合物中的氮气流量，可以在掺氮DLC涂层中获得更高的氮含量。 DLC涂层中的氮添加量明显降低了纳米机械性能，包括纳米硬度和降低的模量。另外，在划痕测试期间产生的划痕的深度在很大程度上取决于N掺杂DLC涂层中的氮含量，并且在相同的施加载荷下，掺杂的氮含量越高，产生的划痕越深。然而，对于掺杂有不同氮含量的DLC涂层，在相同载荷下由纳米划痕试验得出的摩擦系数（LF / INF）相似，因此似乎与所添加的氮含量无关。

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  • 来源
    《Journal of Materials Science》 |2006年第6期|1705-1709|共5页
  • 作者

    Zhang Ruijun; Ma Hongtao;

  • 作者单位

    Key Laboratory of Mestable Materials Science Technology School of Materials Science Engineering Yanshan University;

    Xinke Electronic Materials Company;

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