Comparative study of titanium carbide and nitride coatings grown by cathodic vacuum arc technique

D.M.Devia; E. Restrepo-Parra; P.J. Arangcr

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Comparative study of titanium carbide and nitride coatings grown by cathodic vacuum arc technique

机译：阴极真空电弧技术生长碳化钛和氮化钛涂层的比较研究

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Titanium nitride (TiN), titanium carbide (TiC) thin films and TiC/TiN bilayers have been deposited on AISI 304 stainless steel substrates by plasma assisted physical vapor deposition technique-reactive pulsed vacuum arc method. The coatings were characterized in terms of crystalline structure, microstructure and chemical nature by X-ray diffraction and X-ray photoelectron spectroscopy, respectively. Tribological behavior was investigated using ball on disc technique. The average coefficient of friction was measured, showing lower values for the TiN/TiC bilayer. Dynamic wear curves were performed for each coating, observing a better wear resistance for TiN/TiC bilayers, compared to TiN and TiC monolayers. On the other hand, the TiCN formation in the TiN/TiC bilayer was observed, being attributed to the interdiffu-sion between TiN and TiC at the interface. Moreover, the substrate temperature influence was analysing observing a good behavior at _Ts = 115 ℃.

机译：氮化钛（TiN），碳化钛（TiC）薄膜和TiC / TiN双层膜已通过等离子辅助物理气相沉积技术-反应性脉冲真空电弧法沉积在AISI 304不锈钢基底上。通过X射线衍射和X射线光电子能谱分别对涂层的晶体结构，微观结构和化学性质进行了表征。使用圆盘球技术研究了摩擦学行为。测量了平均摩擦系数，显示出较低的TiN / TiC双层值。对每个涂层进行动态磨损曲线，与TiN和TiC单层相比，观察到TiN / TiC双层具有更好的耐磨性。另一方面，观察到在TiN / TiC双层中形成了TiCN，这归因于TiN和TiC在界面处的相互扩散。此外，在_Ts = 115℃下，分析基板温度的影响观察到良好的行为。

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《Applied Surface Science》 |2011年第3期|p.1164-1174|共11页
作者
D.M.Devia; E. Restrepo-Parra; P.J. Arangcr;
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作者单位

Laboratorio de Ftsica del Plasma, Universidad National de Colombia Sede Manizales, Km. 9 via al aeropuerto Campus La Nubia, Manizales, Colombia,Universidad Tecnoldgica de Pereira, Pereira, Colombia;

Laboratorio de Ftsica del Plasma, Universidad National de Colombia Sede Manizales, Km. 9 via al aeropuerto Campus La Nubia, Manizales, Colombia,KM Computational Applications, Universidad National de Colombia Sede Manizales, Km. 9 via al aeropuerto Campus La Nubia, Manizales, Colombia;

Laboratorio de Ftsica del Plasma, Universidad National de Colombia Sede Manizales, Km. 9 via al aeropuerto Campus La Nubia, Manizales, Colombia;

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正文语种 eng
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关键词
thin films; pulsed arc; XPS; XRD; wear; bilayer; tribology;

机译：薄膜;脉冲电弧XPS;XRD;穿;双层摩擦学;

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机译：氮化钛（TiN），氮化氧钛（TiON）和氮化铝钛（TiAlN）作为生物植入物表面涂层的比较研究
2. Thermal conductivity of titanium nitride/titanium aluminum nitride multilayer coatings deposited by lateral rotating cathode arc [J] . Samani M. K., Ding X. Z., Khosravian N., Thin Solid Films . 2015,第mara2期

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Comparative study of titanium carbide and nitride coatings grown by cathodic vacuum arc technique

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