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Theoretical investigations on multiple-reflection and Rayleigh absorption-emission-scattering effects in laser drilling

机译:激光钻孔中多次反射和瑞利吸收-发射-散射效应的理论研究

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摘要

A fundamental study of laser drilling was performed with computational analysis. High power Q-switched diode-pumped laser drilling simulations were conducted on N-type silicon wafers. In the numerical model, the volume of fluid method was adopted to trace the free surface of the drilled-hole with the governing equations including continuity, momentum, and energy equation. The laser beam was considered as a surface heat flux with near-Gaussian distribution. The simulation model took into account the physical phenomena, taking place during drilling of the silicon wafer, such as the effects of recoil pressure producing a narrow and deep profile, Fresnel absorption transferring the energy from laser beam to workpiece, multiple-reflection raising the absorption of laser energy, and Rayleigh absorption-emission-scattering absorbing and distributing the entrance laser energy. In particular, a novel model for laser drilling was proposed from the view point of the transmitted, absorbed, emitted, and scattered light.
机译:通过计算分析对激光钻孔进行了基础研究。在N型硅晶片上进行了高功率Q开关二极管泵浦激光钻孔仿真。在数值模型中,采用流体体积法来追踪钻孔的自由表面,其控制方程包括连续性,动量和能量方程。激光束被认为是具有近高斯分布的表面热通量。该仿真模型考虑了在硅晶片钻孔过程中发生的物理现象,例如反冲压力产生窄而深的轮廓的影响,菲涅耳吸收将能量从激光束传递到工件,多次反射提高了吸收的激光能量,瑞利吸收-发射-散射吸收和分配入射激光能量。特别地,从透射,吸收,发射和散射的光的角度,提出了一种新型的激光钻孔模型。

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