Surface modification of doped ZnO thin films

S.Flickyngerova; J.Skriniarova; M. Netrvalova; J. Kovac Jr; I. Novotny; P. Sutta; V.Tvarozek

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Surface modification of doped ZnO thin films

机译：掺杂ZnO薄膜的表面改性

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摘要

Effects of photo-assisted electrodeless and ion RF-sputter etching on the structural and optical properties of sputtered ZnO:Al thin films were investigated. Photo-assisted electrodeless etching was appropriate for getting "smooth" surfaces and ion RF-sputter etching by high power has significantly modified the surface roughness with an increase of the light diffuse transmittance.

机译：研究了光辅助无电极和离子RF溅射刻蚀对溅射ZnO：Al薄膜的结构和光学性能的影响。光辅助无电极蚀刻适用于获得“光滑”的表面，并且通过高功率进行的离子RF溅射蚀刻显着地改变了表面粗糙度，并增加了光扩散透射率。

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来源
《Applied Surface Science》 |2010年第18期|P.5606-5609|共4页
作者
S.Flickyngerova; J.Skriniarova; M. Netrvalova; J. Kovac Jr; I. Novotny; P. Sutta; V.Tvarozek;
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作者单位

Department of Microelectronics, Slovak University of Technology, Bratislava, Slovakia;

rnDepartment of Microelectronics, Slovak University of Technology, Bratislava, Slovakia;

rnDepartment of Materials & Technology, New Technology Center, University of West Bohemia, Plzen, Czech Republic;

rnDepartment of Microelectronics, Slovak University of Technology, Bratislava, Slovakia;

rnDepartment of Microelectronics, Slovak University of Technology, Bratislava, Slovakia;

rnDepartment of Materials & Technology, New Technology Center, University of West Bohemia, Plzen, Czech Republic;

rnDepartment of Microelectronics, Slovak University of Technology, Bratislava, Slovakia;

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正文语种 eng
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关键词
thin-film solar cell; ZnO:Al; sputtering;

机译：薄膜太阳能电池ZnO：Al;溅镀;

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2. Surface Modification of Al-Doped ZnO Transparent Conducive Thin Films with Polycrystalline Zinc Molybdenum Oxide [J] . Meng Lei, Yang Xiaoguang, Chai Hongyu, ACS applied materials & interfaces . 2019,第29期

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6. Deposition of F-doped ZnO transparent thin films using ZnF2-doped ZnO target under different sputtering substrate temperatures [O] . Fang-Hsing Wang, Cheng-Fu Yang, Yen-Hsien Lee 2014

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7. Surface Modification of Al-Doped ZnO Transparent Conducive Thin Films with Polycrystalline Zinc Molybdenum Oxide [O] . -1

机译：用多晶硅锌氧化锌渗透ZnO透明电薄膜的表面改性

Surface modification of doped ZnO thin films

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