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Study of AFM-based nanometric cutting process using molecular dynamics

机译：利用分子动力学研究基于原子力显微镜的纳米切割工艺

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摘要

Three-dimensional molecular dynamics (MD) simulations are conducted to investigate the atomic force microscope (AFM)-based nanometric cutting process of copper using diamond tool. The effects of tool geometry, cutting depth, cutting velocity and bulk temperature are studied. It is found that the tool geometry has a significant effect on the cutting resistance. The friction coefficient (cutting resistance) on the nanoscale decreases with the increase of tool angle as predicted by the macroscale theory. However, the friction coefficients on the nanoscale are bigger than those on the macroscale. The simulation results show that a bigger cutting depth results in more material deformation and larger chip volume, thus leading to bigger cutting force and bigger normal force. It is also observed that a higher cutting velocity results in a larger chip volume in front of the tool and bigger cutting force and normal force. The chip volume in front of the tool increases while the cutting force and normal force decrease with the increase of bulk temperature.
机译：进行了三维分子动力学（MD）模拟，以研究基于原子力显微镜（AFM）的使用金刚石工具对铜进行纳米切割的过程。研究了刀具几何形状，切削深度，切削速度和整体温度的影响。发现刀具的几何形状对切削阻力具有显着影响。如宏观尺度理论所预测，纳米尺度上的摩擦系数（切削阻力）随着工具角的增加而减小。但是，纳米级的摩擦系数大于宏观级的摩擦系数。仿真结果表明，较大的切削深度会导致较大的材料变形和较大的切屑体积，从而导致较大的切削力和较大的法向力。还可以观察到，较高的切削速度会导致刀具前的切屑体积更大，切削力和法向力也会更大。随着整体温度的升高，刀具前方的切屑量增大，而切削力和法向力减小。

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  • 来源
    《Applied Surface Science》 |2010年第23期|P.7160-7165|共6页
  • 作者

    Peng-zhe Zhu; Yuan-zhong Hu; Tian-bao Ma; Hui Wang;

  • 作者单位

    State Key Laboratory of Tribology, Tsinghua University, Chengfu Road, Beijing 100084, PR China;

    rnState Key Laboratory of Tribology, Tsinghua University, Chengfu Road, Beijing 100084, PR China;

    rnState Key Laboratory of Tribology, Tsinghua University, Chengfu Road, Beijing 100084, PR China;

    rnState Key Laboratory of Tribology, Tsinghua University, Chengfu Road, Beijing 100084, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    `molecular dynamics; nanometric cutting; AFM;

    机译：分子动力学;纳米切割原子力显微镜;

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