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首页> 外文期刊>Applied Surface Science >Molecular Dynamics Simulation Of Subsurface Deformed Layers In Afm-based Nanometric Cutting Process
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Molecular Dynamics Simulation Of Subsurface Deformed Layers In Afm-based Nanometric Cutting Process

机译：基于AFM的纳米切削过程中地下变形层的分子动力学模拟

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Three-dimensional molecular dynamics simulations of AFM-based nanometric cutting monocrystalline copper with pin tool radius of 0.713 nm are performed to investigate the effect of uncut chip thicknesses (0.1805 nm, 0.361 nm, 0.5415 nm, 0.722 nm, 0.9025 nm, 1.0875 nm, and 1.268 nm) on the depth of subsurface deformed layers. The EAM potential and Morse potential are utilized respectively to compute the interactions between workpiece atoms, the interactions between workpiece atoms and tool atoms. The single-atom potential energy variations of the workpiece atoms within the subsurface regions during the cutting process are obtained and analyzed through a deformation criterion to determine the deformation behaviors of subsurface atoms. The simulation results reveal that the depth of subsurface deformed layers is affected by the AFM pin tool's rake angle. At each uncut chip thickness, the AFM pin tool presents different negative rake angles, consequently different degrees of deformation in the subsurface take place.
机译：进行了基于AFM的纳米切割单晶铜（针工具半径为0.713 nm）的三维分子动力学模拟，以研究未切屑厚度（0.1805 nm，0.361 nm，0.5415 nm，0.722 nm，0.9025 nm，1.0875 nm，和1.268 nm）在地下变形层的深度。 EAM势和莫尔斯电势分别用于计算工件原子之间的相互作用，工件原子与工具原子之间的相互作用。获得并通过变形判据分析了地下区域内工件原子的单原子势能变化，并确定了地下原子的变形行为。仿真结果表明，地下变形层的深度受AFM销钉工具前角的影响。在每个未切屑厚度下，AFM销钉工具都会呈现出不同的负前角，因此在地下发生不同程度的变形。

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