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Hydrogen desorption from a diamond-like carbon film by hyperthermal atomic oxygen exposure

机译:通过高温原子氧暴露从类金刚石碳膜中解吸氢

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The densities of hydrogen and carbon atoms in a hydrogenated diamond-like carbon (DLC) film exposed to a hyperthermal atomic oxygen beam were investigated by Rutherford backscattering spectroscopy (RBS) and elastic recoil detection analysis (ERDA). The hydrogen density in DLC decreased upon atomic oxygen beam exposure with collision energy as low as 2 eV, whereas an exposure greater than 3 eV was necessary to remove carbon atoms. A high-collision energy also led to hydrogen desorption in the deeper region of DLC. The surface density of hydrogen decreased 6% by atomic oxygen exposure, and was independent of the collision energy. Additionally, the non-bonded hydrogen, which could diffuse in DLC, was desorbed by the energy transfer from the atomic oxygen collisions.
机译:通过卢瑟福背散射光谱法(RBS)和弹性反冲检测分析(ERDA)研究了暴露于高温原子氧束的氢化类金刚石碳(DLC)膜中氢和碳原子的密度。原子氧束暴露于低至2 eV的碰撞能量后,DLC中的氢密度降低,而去除碳原子则需要大于3 eV的暴露。高碰撞能量还导致DLC较深区域的氢解吸。氢的表面密度由于原子氧的暴露而降低了6%,并且与碰撞能无关。另外,可能在DLC中扩散的非键合氢通过原子氧碰撞产生的能量转移而解吸。

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