机译:离子束溅射沉积和热退火混合制备含的ZnO。
Department of Electronic Engineering, National Taiwan University of Science and Technology, #43 KeeLung Road, Sec. 4, Taipei 106, Taiwan;
Department of Electronic Engineering, National Taiwan University of Science and Technology, #43 KeeLung Road, Sec. 4, Taipei 106, Taiwan;
Department of Electronic Engineering, National Taiwan University of Science and Technology, #43 KeeLung Road, Sec. 4, Taipei 106, Taiwan;
ZnO; sputtering; photoelectron spectroscopy; defects;
机译:离子束溅射沉积和退火后条件对TiAlN薄膜电性能和热稳定性的影响
机译:离子束溅射沉积退火退火对Zr薄膜的氧化和转变
机译:通过离子束溅射沉积与后退火相结合制备的电致变色WO3薄膜
机译:沉积退火温度对RF磁控溅射制备的ZnO膜性能的影响
机译:通过溅射制备的掺b氧化物膜和器件,用于光电应用。
机译:快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构电学和光学性质的影响
机译:在不同沉积温度下RF-磁控溅射制备的ZnO纳米结构的结构,光学和UV光响应性的退火效应