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Synthesis and field emission properties of carbon nanotubes grown in ethanol flame based on a photoresist-assisted catalyst annealing process

机译：基于光致抗蚀剂辅助催化剂退火工艺的乙醇火焰中生长的碳纳米管的合成及场发射特性

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摘要

Carbon nanotubes (CNTs) have been grown directly on a Si substrate without a diffusion barrier in ethanol diffusion flame using Ni as the catalyst after a photoresist-assisted catalyst annealing process. The growth mechanism of as-synthesized CNTs is confirmed by scanning electron microscopy, high resolution transmission-electron microscopy and energy-dispersive spectroscopy. The photoresist is the key for the formation of active catalyst particles during annealing process, which then result in the growth of CNTs. The catalyst annealing temperature has been found to affect the morphologies and field electron emission properties of CNTs significantly. The field emission properties of as-grown CNTs are investigated with a diode structure and the obtained CNTs exhibit enhanced characteristics. This technique will be applicable to a low-cost fabrication process of electron-emitter arrays.
机译：在光致抗蚀剂辅助的催化剂退火工艺之后，使用Ni作为催化剂，碳纳米管（CNT）已直接在Si衬底上生长，没有乙醇扩散火焰中的扩散阻挡层。合成碳纳米管的生长机理已通过扫描电子显微镜，高分辨率透射电子显微镜和能量色散光谱法得以证实。光致抗蚀剂是在退火过程中形成活性催化剂颗粒的关键，然后导致碳纳米管的生长。已经发现催化剂退火温度显着影响CNT的形态和场电子发射性能。用二极管结构研究了生长态的CNT的场发射特性，获得的CNT具有增强的特性。该技术将适用于电子发射器阵列的低成本制造工艺。

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  • 来源
    《Applied Surface Science》 |2009年第18期|7905-7911|共7页
  • 作者

    Xiaoxia Yang; Guojia Fang; Nishuang Liu; Chong Wang; Qiao Zheng; Hai Zhou; Dongshan Zhao; Hao Long; YuPing Liu; Xingzhong Zhao;

  • 作者单位

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

    Key Lab of Acoustic and Photonic Materials and Devices of Ministry of Education, Department of Electronic Science & Technology, School of Physical Science & Technology, Wuhan University, Luojia Hill, Wuhan, 430072, PR China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    carbon nanotubes; flame synthesis; field emission; annealing; photoresist;

    机译：碳纳米管;火焰合成;场发射;退火;光刻胶;

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