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Effect of N content on phase configuration, nanostructure and mechanical behaviors in Ti-C_x-N_y thin films

机译：氮含量对Ti-C_x-N_y薄膜相结构，纳米结构和力学行为的影响

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摘要

Ti-C_x-N_y thin films with different nitrogen contents were deposited by way of incorporation of different amounts of nitrogen into TiC_(1.02) using unbalanced reactive unbalanced dc magnetron sputtering method. X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), high-resolution transmission electron microscopy (HRTEM) and microindentation methods were used to investigate their phase configurations, nanostructures and mechanical behaviors in order to investigate their dependences on nitrogen content. The result indicated that the nitrogen content had a significant effect on phase configuration, nanostructure and mechanical behaviors of Ti-C_x-N_y thin films. The nitrogen-free TiC_(1.02) films exhibited a polycrystallite with nano-grains. On one hand, incorporated nitrogen substituted C in TiC_(1.02). producing Ti(C,N), and subsequently linked to the substituted C, forming C-N. On the other hand, the substituted C lined to each other, forming C-C. As a result, nanocomposite thin films consisting of nanocrystalline Ti(C,N) and amorphous (C, C-N) were produced. With further incorporation of nitrogen more C was substituted, accompanying with formation of more amorphous matrices and decrease of size of nanocrystalline Ti(C,N). The trend was enhanced with further increase of nitrogen content. A microhardness maximum of ～58 GPa was obtained in nitrogen-free TiC_(1.02) thin films. This value was linearly decreased with incorporation of N or increase of N content, and finally a hardness value of about 28 GPa was followed at a N content of ～25 at.%. Both elastic modulus and residual compressive stress values exhibited similar trends.
机译：采用不平衡反应不平衡直流磁控溅射法，通过向TiC_（1.02）中引入不同量的氮，沉积了不同氮含量的Ti-C_x-N_y薄膜。为了研究它们对氮含量的依赖性，使用了X射线衍射（XRD），X射线光电子能谱（XPS），高分辨率透射电子显微镜（HRTEM）和显微压痕方法来研究它们的相构型，纳米结构和力学行为。 。结果表明，氮含量对Ti-C_x-N_y薄膜的相结构，纳米结构和力学行为有显着影响。无氮TiC_（1.02）薄膜具有纳米晶粒的多晶。一方面，在TiC_（1.02）中引入了氮取代的C。生成Ti（C，N），然后连接到取代的C，形成C-N。另一方面，取代的C彼此排列，形成C-C。结果，制备了由纳米晶体Ti（C，N）和非晶态（C，C-N）组成的纳米复合薄膜。随着氮的进一步掺入，更多的C被取代，同时形成更多的无定形基质和纳米晶Ti（C，N）的尺寸减小。随着氮含量的进一步增加，这种趋势得到加强。在无氮TiC_（1.02）薄膜中获得的最大显微硬度为〜58 GPa。随着N的添加或N含量的增加，该值线性降低，最后在N含量〜25 at。％时，硬度值达到约28 GPa。弹性模量和残余压应力值都表现出相似的趋势。

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  • 来源
    《Applied Surface Science》 |2009年第18期|7858-7863|共6页
  • 作者

    Y.H. Lu; J.P. Wang; Y.G. Shen;

  • 作者单位

    Scientific Center for Materials Service Safety, University of Science and Technology Beijing, No. 30 Xueyuan Road, Beijing 100083, PR China;

    Science School, Beijing University of Civil Engineering and Architecture, Beijing 100044, PR China;

    Department of Manufacturing Engineering & Engineering Management, City University of Hong Kong, Kowloon, Hong Kong;

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  • 正文语种 eng
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  • 关键词

    hardness; microstructure; nanocomposite thin films; N content; Ti-C_x-N_y;

    机译：硬度;微观结构纳米复合薄膜;N含量;Ti-C_x-N_y;

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