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首页> 外文期刊>Applied Surface Science >Morphology and photoluminescence properties of zinc oxide films grown by pulsed laser deposition
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Morphology and photoluminescence properties of zinc oxide films grown by pulsed laser deposition

机译：脉冲激光沉积生长氧化锌薄膜的形貌和光致发光特性

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摘要

Zinc oxide films with different morphologies have been grown by pulsed laser deposition, varying substrate temperature and oxygen pressure. At low oxygen pressure and low substrate temperature continuous films with different roughness have been obtained, while at high substrate temperature a film with sparse hexagonal pyramids has been observed. Increasing the oxygen pressure the film became rougher and at 100 Pa a rod-array has been deposited. The columns of this rod-array grew along the wurtzite c-axis perpendicularly to the substrate surface as proved by X-ray diffraction measurements. Near to the sample borders the columns were slightly tilted towards the center of the sample. The possible growth mechanisms giving rise to the different morphologies have been discussed. Low-temperature photoluminescence measurements allowed to get information about the film quality, showing the variations of the excitonic peak and two defect bands (green and violet-blue) with the different deposition parameters.
机译：通过脉冲激光沉积，改变衬底温度和氧气压力，已经生长出具有不同形态的氧化锌膜。在低氧气压力和低基材温度下，已获得具有不同粗糙度的连续膜，而在高基材温度下，已观察到具有稀疏六边形金字塔的膜。增加氧气压力会使膜变得更粗糙，并在100 Pa下沉积了棒状阵列。通过X射线衍射测量证明，该棒状阵列的列沿纤锌矿c轴垂直于基材表面生长。在靠近样品边界处，柱子稍微向样品中心倾斜。已经讨论了引起不同形态的可能的生长机制。低温光致发光测量可获取有关膜质量的信息，显示出具有不同沉积参数的激子峰和两个缺陷带（绿色和紫蓝色）的变化。

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  • 来源
    《Applied Surface Science》 |2009年第24期|9680-9683|共4页
  • 作者

    D. Valerini; A.P. Caricato; A. Creti; M. Lomascolo; F. Romano; A. Taurino; T. Tunno; M. Martino;

  • 作者单位

    Dipartimento di Fisica, gruppo L3, Universita del Salento, Via Arnesano, 73100 Lecce, Italy;

    Dipartimento di Fisica, gruppo L3, Universita del Salento, Via Arnesano, 73100 Lecce, Italy;

    IMM-CNR, Istituto per la Microelettronica e Microsistemi, sezione di Lecce, Via Arnesano, 73100 Lecce, Italy;

    IMM-CNR, Istituto per la Microelettronica e Microsistemi, sezione di Lecce, Via Arnesano, 73100 Lecce, Italy;

    Dipartimento di Fisica, gruppo L3, Universita del Salento, Via Arnesano, 73100 Lecce, Italy;

    IMM-CNR, Istituto per la Microelettronica e Microsistemi, sezione di Lecce, Via Arnesano, 73100 Lecce, Italy;

    Dipartimento di Fisica, gruppo L3, Universita del Salento, Via Arnesano, 73100 Lecce, Italy;

    Dipartimento di Fisica, gruppo L3, Universita del Salento, Via Arnesano, 73100 Lecce, Italy;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    ZnO; PLD; morphology; photoluminescence;

    机译：氧化锌;PLD;形态学;光致发光;

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