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Surface morphology and luminescence characterization of β-FeSi_2 thin films prepared by pulsed laser deposition

机译：脉冲激光沉积制备的β-FeSi_2薄膜的表面形貌和发光特性

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摘要

β-FeSi_2 thin films were prepared on Si (111) substrates by pulsed laser deposition (PLD) with a sintering FeSi_2 target and an electrolytic Fe target. The thin films without micron-size droplets were prepared using the electrolytic Fe target; however, the surface without droplets was remarkably rougher using the Fe target than using the FeSi_2 target. After deposition at 600 ℃ and then annealing at 900 ℃ for 20 h, XRD indicated that the thin film prepared using the Fe target had a poly-axis-orientation, but that prepared using the FeSi_2 target had a one-axis-orientation. The PL spectra of the thin films prepared using the FeSi_2 and Fe targets at a growth temperature of 600 ℃ and subsequently annealed at 900 ℃ for 20 h had A-, B-and C-bands. Moreover, it was found that the main peak at 0.808 eV (A-band) in the PL spectrum of the thin films prepared using the FeSi_2 target was the intrinsic luminescence of β-FeSi_2 from the dependence of PL peak energy on temperature and excitation power density.
机译：通过具有烧结FeSi_2靶和电解Fe靶的脉冲激光沉积（PLD）在Si（111）衬底上制备β-FeSi_2薄膜。使用电解铁靶制备无微米尺寸液滴的薄膜；然而，使用Fe靶比不使用FeSi_2靶，没有液滴的表面明显更粗糙。 XRD表明，在600℃下沉积然后在900℃下退火20小时后，用Fe靶制备的薄膜具有多轴取向，而用FeSi_2靶制备的薄膜具有单轴取向。用FeSi_2和Fe靶制备的薄膜的PL光谱在600℃的生长温度下，随后在900℃退火20小时，具有A，B和C带。此外，发现由PL峰值能量对温度和激发功率的依赖性，在使用FeSi_2靶制备的薄膜的PL光谱中，在0.808eV（A带）处的主峰是β-FeSi_2的固有发光。密度。

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  • 来源
    《Applied Surface Science》 |2009年第4期|1227-1231|共5页
  • 作者

    M. Zakir Hossain; Tomohiro Mimura; Noboru Miura; Shin-ichiro Uekusa;

  • 作者单位

    Department of Electronics and Bioinformatics, School of Science and Technology, Meiji University, 1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 274-8571, Japan;

    Department of Electronics and Bioinformatics, School of Science and Technology, Meiji University, 1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 274-8571, Japan;

    Department of Electronics and Bioinformatics, School of Science and Technology, Meiji University, 1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 274-8571, Japan;

    Department of Electronics and Bioinformatics, School of Science and Technology, Meiji University, 1-1 Higashimita, Tama-ku, Kawasaki, Kanagawa 274-8571, Japan;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    β-FeSi_2; droplet; pulsed laser deposition; photoluminescence;

    机译：β-FeSi_2;水滴;脉冲激光沉积光致发光;

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