Raman Spectroscopic Studies Of Pb_xla_(1-x)ti_(1-x/4)o_3 Thin Films Grown On Si Substrates By Rf Magnetron Sputtering

J.L. Zhu; W.L. Zhu; R.T. Li; W.Y. Ge; M. Jiang; J.G. Zhu; D.Q. Xiao; G. Pezzotti

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Raman Spectroscopic Studies Of Pb_xla_(1-x)ti_(1-x/4)o_3 Thin Films Grown On Si Substrates By Rf Magnetron Sputtering

机译：射频磁控溅射在Si衬底上生长的Pb_xla_（1-x）ti_（1-x / 4）o_3薄膜的拉曼光谱研究

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A systematic spectroscopic investigation of Pb_xLa_(1-x)Ti_(1-x/4)O_3 (PLT) thin films grown on PbO/Pt/Ti/SiO_2/Si substrate by RF magnetron sputtering was performed by using confocal Raman spectroscopy. Influence of the growth condition modification including different growth temperatures, with various buffer layer thickness, and post-annealing treatments were analyzed with taking advantages of the corresponding Raman spectral band variation in the respective process. Significant change in the spectral bands occurred with the alteration of the growth condition, and the related mechanisms were discussed after spectral deconvolution, providing reliable information about the direction for film growth.

机译：利用共聚焦拉曼光谱技术对在PbO / Pt / Ti / SiO_2 / Si衬底上生长的Pb_xLa_（1-x）Ti_（1-x / 4）O_3（PLT）薄膜进行了系统的光谱研究。利用在各个过程中相应的拉曼光谱带变化的优势，分析了包括不同生长温度，具有不同缓冲层厚度的生长条件修改的影响，以及后退火处理。随着生长条件的改变，光谱带发生了显着变化，光谱去卷积后讨论了相关机理，从而提供了有关膜生长方向的可靠信息。

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来源
《Applied Surface Science》 |2008年第15期|p.4803-4807|共5页
作者
J.L. Zhu; W.L. Zhu; R.T. Li; W.Y. Ge; M. Jiang; J.G. Zhu; D.Q. Xiao; G. Pezzotti;
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作者单位

Department of Materials Science, Sichuan University, 610064 Chengdu, China;

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正文语种 eng
中图分类应用物理学;
关键词
raman spectroscopy; thin films; lead titanate;

机译：拉曼光谱;薄膜;钛酸铅;

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1. Highly (100)-oriented (Pb_(1-x)La_x)Ti_(1-x/4)O_3/Pb(Zr_(0.20)Ti_(0.80))O_3/(Pb_(1-x)La_x)Ti_(1-x/4)O_3 multilayered thin films by RF magnetron sputtering [J] . Jiagang Wu, Dingquan Xiao, Jiliang Zhu, Physica Status Solidi. A, Applications and Materials Science . 2007,第7期

机译：高度（100）的（Pb_（1-x）La_x）Ti_（1-x / 4）O_3 / Pb（Zr_（0.20）Ti_（0.80））O_3 /（Pb_（1-x）La_x）Ti_（1 -x / 4）O_3射频磁控溅射多层薄膜
2. Highly (100)-oriented Pb(Zr_(0.20)Ti_(0.80))O_3/(Pb_(1-x)La_x)Ti_(1-x/4)O_3 multilayered thin films prepared by RF magnetron sputtering [J] . Jiagang Wu, Dingquan Xiao, Jiliang Zhu, Microelectronic Engineering . 2008,第2期

机译：通过射频磁控溅射制备的高度（100）取向的Pb（Zr_（0.20）Ti_（0.80））O_3 /（Pb_（1-x）La_x）Ti_（1-x / 4）O_3多层薄膜
3. Composition dependence of structural and optical properties of Ba(Zr_x,Ti_(1-x))O_3 thin films grown on MgO substrates by pulsed laser deposition [J] . J.Z. Xin, C.W. Leung, H.L.W. Chan Thin Solid Films . 2011,第19期

机译：脉冲激光沉积在MgO衬底上生长的Ba（Zr_x，Ti_（1-x））O_3薄膜的结构和光学性质的成分依赖性
4. Raman Spectra Study on Multilayered Compositional Graded (Ba_(0.8)Sr_(0.2))(Ti_(1-x)Zr_x)O_3 Thin Films [C] . Can Wang, B.L. Cheng, S.Y. Wang, China International Conference on High-Performance Ceramics . 2005

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5. Study of optoelectronic devices using epitaxial barium titanate thin films grown by RF magnetron sputtering. [D] . Barrios, Pedro Jose. 1997

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机译：磁控溅射的化学计量控制 Bi $ _2 $ sr $ _2 $ Ca $ _ {1-x} $ Y $ _x $ Cu $ _ $ $ O $ _y $（0 $ \ le $ x $ \ le $ 0.5）薄膜，成分扩散库：基质偏差和气体密度因子

Raman Spectroscopic Studies Of Pb_xla_(1-x)ti_(1-x/4)o_3 Thin Films Grown On Si Substrates By Rf Magnetron Sputtering

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