• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied Surface Science >Correlation Between Optical Characterization Of The Plasma In Reactive Magnetron Sputtering Deposition Of Zr-n On Ss 316l And Surface And Mechanical Properties Of The Deposited Films
【24h】

Correlation Between Optical Characterization Of The Plasma In Reactive Magnetron Sputtering Deposition Of Zr-n On Ss 316l And Surface And Mechanical Properties Of The Deposited Films

机译：Zs-n在Ss 316l上反应磁控溅射沉积等离子体的光学特性与沉积膜的表面与力学性能的关系

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Optical and surface spectroscopies as well as nanoindentation techniques have been used to study ZrN coatings on 316L stainless steel obtained by DC-reactive magnetron sputtering. The deposit process was carried out using initial and working pressures of 10~(-6) Torr and 10~(-3) Torr, respectively. The experimental set-up for optical spectra acquisition was designed for the study in situ of the plasma in the deposition chamber. Auger spectroscopy, SEM and X-ray diffraction were used to characterize the coatings. Nanoindentation tests were carried out to measure the mechanical properties of the coating. Plasma characterization revealed the presence of CN molecules and Cr ions in the plasma. Surface spectroscopy results showed that ZrN, Zr_3N_4 and ZrC coexist in the coating. These results allowed the understanding of the mechanical behavior of the coatings, demonstrating the importance of the plasma characterization as a tool for tailoring the properties of hard coatings.
机译：光学和表面光谱学以及纳米压痕技术已被用于研究通过直流反应磁控溅射在316L不锈钢上的ZrN涂层。沉积过程分别使用初始压力和工作压力10〜（-6）Torr和10〜（-3）Torr进行。设计用于光谱采集的实验装置，用于在沉积室内对等离子体进行原位研究。使用俄歇光谱，SEM和X射线衍射来表征涂层。进行纳米压痕测试以测量涂层的机械性能。血浆表征揭示了血浆中CN分子和Cr离子的存在。表面光谱结果表明，ZrN，Zr_3N_4和ZrC共存于涂层中。这些结果使人们了解了涂层的机械性能，证明了等离子体表征作为调整硬涂层性能的工具的重要性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号