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首页> 外文期刊>Applied Surface Science >Mechanical Properties Of Sol-gel Derived Lead Zirconate Titanate Thin Films By Nanoindentation
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Mechanical Properties Of Sol-gel Derived Lead Zirconate Titanate Thin Films By Nanoindentation

机译：纳米压印法制备溶胶凝胶衍生的钛酸锆钛酸铅薄膜

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摘要

Lead zirconate titanate (PZT) thin films are deposited on platinized silicon substrate by sol-gel process. The crystal structure and surface morphology of PZT thin films are characterized by X-ray diffraction and atomic force microscopy. Depth-sensing nanoindentation system is used to measure mechanical characteristics of PZT thin films. X-ray diffraction analyses confirm the single-phase perovskite structures of all PZT thin films. Nanoindentation measurements reveal that the indentation modulus and hardness of PZT thin films are related with the grain size and crystalline orientation. The increases of the indentation modulus and hardness with grain size are observed, indicating the reverse Hall-Petch effect. Furthermore, the indentation modulus of (1 1 1)-oriented PZT thin film is higher than those of (1 0 0)-and random-oriented films. The consistency between experimental data and numerical results of the effective indentation moduli for fiber-textured PZT thin films using Voigt-Reuss-Hill model is obtained.
机译：钛酸锆钛酸铅（PZT）薄膜通过溶胶-凝胶工艺沉积在镀铂硅基板上。通过X射线衍射和原子力显微镜对PZT薄膜的晶体结构和表面形貌进行表征。深度感应纳米压痕系统用于测量PZT薄膜的机械特性。 X射线衍射分析证实了所有PZT薄膜的单相钙钛矿结构。纳米压痕测量表明，PZT薄膜的压痕模量和硬度与晶粒尺寸和晶体取向有关。观察到压痕模量和硬度随晶粒尺寸的增加，表明反向的霍尔-帕奇效应。此外，（1 1 1）取向的PZT薄膜的压痕模量高于（1 0 0）和随机取向的膜的压痕模量。使用Voigt-Reuss-Hill模型获得了纤维化PZT薄膜的有效压痕模量的实验数据与数值结果之间的一致性。

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