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METHOD FOR MANUFACTURING LEAD ZIRCONATE TITANATE THICK FILM BY SOL-GEL PROCESS
METHOD FOR MANUFACTURING LEAD ZIRCONATE TITANATE THICK FILM BY SOL-GEL PROCESS
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机译：溶胶-凝胶法制备铅钛酸钛厚膜的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for manufacturing a thick film of lead zirconate titanate by using a sol-gel method.;SOLUTION: This method includes (a) a stage where a precursor of lead is dissolved into a mixed solvent of an acid and a diol and is stirred, (b) a stage where each of zirconium and a precursor of titanium is dissolved into the mixed solvent of the acid and the diol and is stirred, (c) a stage where a stock solution of lead zirconate titanate (PZY) is prepared by blending the solutions prepared in the (a) and (b) stages, (d) a stage where the stock solution of PZT is spin-coated on a substrate, and (e) a stage where a heat treatment is conducted. Thereby, each of metal ligands is stabilized when producing a PZT thick film, so that the PZT thick film, in which cracking phenomena are suppressed and which is dense and excellent in stability, crystallinity, and electrical characteristics, can be obtained.;COPYRIGHT: (C)2003,JPO
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