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Surface Depth Analysis For Fluorinated Block Copolymer Films By X-ray Photoelectron Spectroscopy Using C_(60) Cluster Ion Beam

机译:使用C_(60)簇离子束的X射线光电子能谱分析含氟嵌段共聚物薄膜的表面深度

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X-ray photoelectron spectroscopy (XPS) using fullerene (C_(60)) cluster ion bombardment was applied to films of a fluorinated block copolymer. Spectra so obtained were essentially different from those using Ar ion beam. Structure in the surface region with the depth down to 60 nm drawn on the basis of XPS with C_(60) beam was essentially the same as the one drawn by the result using dynamic secondary ion mass spectrometry, which is a well-established method for the depth analysis of polymers. This implies that XPS using C_(60) beam enables one to gain access to the depth analysis of structure in polymer films with the depth range over the analytical depth of conventional XPS, that is, three times inelastic mean-free path of photoelectrons.
机译:使用富勒烯(C_(60))簇离子轰击的X射线光电子能谱(XPS)应用于氟化嵌段共聚物的薄膜。如此获得的光谱与使用Ar离子束的光谱本质上不同。根据XPS的C_(60)束绘制的深度小于60 nm的表面区域的结构与动态二次离子质谱分析得出的结果基本相同,这是一种公认​​的方法聚合物的深度分析。这意味着使用C_(60)束的XPS使人们能够获得深度范围超过传统XPS分析深度的聚合物膜中结构的深度分析,即光电子的无弹性无均值路径的三倍。

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