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Metal-assisted Sims And Cluster Ion Bombardment For Ion Yield Enhancement

机译：金属辅助模拟物和簇离子轰击提高离子产量

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In addition to structural information, a detailed knowledge of the local chemical environment proves to be of ever greater importance, for example for the development of new types of materials as well as for specific modifications of surfaces and interfaces in multiple fields of materials science or various biomedical and chemical applications. But the ongoing miniaturization and therefore reduction of the amount of material available for analysis constitute a challenge to the detection limits of analytical methods. In the case of time-of-flight secondary ion mass spectrometry (TOF-SIMS), several methods of secondary ion yield enhancement have been proposed. This paper focuses on the investigation of the effects of two of these methods, metal-assisted SIMS and polyatomic primary ion bombardment. For this purpose, thicker layers of polystyrene (PS), both pristine and metallized with different amounts of gold, were analyzed using monoatomic (Ar~+, Ga~+, Xe~+, Bi~+) and polyatomic (SF_5~+, Bi_3~+, C_(60)~+) primary ions. It was found that polyatomic ions generally induce a significant increase of the secondary ion yield. On the other hand, with gold deposition, a yield enhancement can only be detected for monoatomic ion bombardment.
机译：除了结构信息外，对本地化学环境的详细了解也变得越来越重要，例如，对于开发新型材料以及对材料科学或各个领域的表面和界面进行特定修改而言生物医学和化学应用。但是，正在进行的小型化以及因此减少了可用于分析的材料量，对分析方法的检测极限构成了挑战。在飞行时间二次离子质谱（TOF-SIMS）的情况下，已经提出了几种提高二次离子产率的方法。本文着重研究金属辅助SIMS和多原子一次离子轰击这两种方法的效果。为此，使用单原子（Ar〜+，Ga〜+，Xe〜+，Bi〜+）和多原子（SF_5〜+， Bi_3〜+，C_（60）〜+）初级离子。发现多原子离子通常引起次级离子产率的显着增加。另一方面，利用金沉积，只能检测到单原子离子轰击的产率提高。

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