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Microtribological Properties Of Molecularly Thin Carboxylic Acid Functionalized Imidazolium Ionic Liquid Film On Single-crystal Silicon

机译:单晶硅上分子稀薄的羧酸官能化的咪唑离子液体薄膜的微摩擦学性质

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摘要

A series of 1-alkyl-3-ethylcarboxylic acid imidazolium chloride ([AElmi][Cl]) ionic liquids was synthesized and evaluated as a new kind of lubricant for microelectromechanical system (MEMS). In this research, novel molecular thin ionic liquid films (ILs) with various bonding percentages were prepared with different annealing temperatures and times. Film wettability was determined by measurement of contact angle and thickness with the ellipsometric method. The chemical composition, structure and morphology were characterized by the means of multi-technique X-ray photoelectron spectrometric, and atomic force microscopic analysis, respectively. The nano- and microtribological properties of the ionic liquid film were investigated. The morphologies of wear tracks of IL films were examined using a 3D non-contact profilometer. The influence of chain length on friction in nano-scale, and the effect of bonding percentage and sliding frequency on friction coefficient, carry-bearing capacity and durability in micro-scale were studied. Data are compared to the perfluoropolyether lubricant Z Dol. The [AEImi][Cl] ionic liquid films with appropriate bonding percentage exhibited comparable load-bearing capacity and durability than Z Dol 3800 at thickness level of several nanometers. Therefore, the [AEImi][Cl] ionic liquid film shows strong potential applications involving the lubrication and protection of MEMS.
机译:合成了一系列的1-烷基-3-乙基羧酸咪唑鎓氯化物([AElmi] [Cl])离子液体,并作为一种新型的微机电系统(MEMS)润滑剂进行了评估。在这项研究中,制备了具有不同键合百分比的新型分子离子液体薄膜(IL),具有不同的退火温度和时间。膜的润湿性通过椭圆偏振法通过测量接触角和厚度来确定。通过多种技术的X射线光电子能谱和原子力显微镜分析对化学成分,结构和形貌进行了表征。研究了离子液体薄膜的纳米和微摩擦学特性。使用3D非接触轮廓轮廓仪检查了IL膜的磨损轨迹的形态。研究了链长对纳米级摩擦的影响,以及键合百分率和滑动频率对微米级摩擦系数,承载能力和耐久性的影响。将数据与全氟聚醚润滑剂Z Dol进行比较。在几纳米的厚度水平下,具有适当键合百分比的[AEImi] [Cl]离子液体薄膜表现出与Z Dol 3800相当的承重能力和耐久性。因此,[AEImi] [Cl]离子液体膜显示出强大的潜在应用,涉及MEMS的润滑和保护。

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