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Characterization of iron oxide layers using Auger electron spectroscopy

机译：用俄歇电子能谱表征氧化铁层

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摘要

Metals can form several kinds of oxides. Iron forms wustite (FeO), magnetite (FeO + Fe_2O_3 or Fe_3O_4) and haematite (Fe_2O_3). Iron oxides, especially magnetite, are used for insulation between the lamellas of an electromotor made of electromagnetic sheet. In this work, iron oxide layers were characterized on industrial samples of electromagnetic sheet by AES depth profile analysis, and iron oxides with known chemical composition were used as reference samples, i.e. a magnetite mineral and a standard haematite reference sample. The magnetite mineral was chosen because it can be found in nature in a very pure form. The selection of reference samples was also verified on samples with an oxide layer of known composition, which were prepared by sputter deposition. The composition of the sputtered oxide layers was analysed by the weight-gain method and Rutherford backscattering without the use of standard reference materials (SRM), and the results were then compared with those obtained by AES depth profile analysis.
机译：金属可以形成几种氧化物。铁形成钙铁矿（FeO），磁铁矿（FeO + Fe_2O_3或Fe_3O_4）和赤铁矿（Fe_2O_3）。氧化铁，特别是磁铁矿，用于绝缘由电磁片制成的电动机的薄板之间。在这项工作中，通过AES深度分布分析在电磁板的工业样品上表征了氧化铁层，并使用具有已知化学成分的氧化铁作为参考样品，即磁铁矿和标准赤铁矿参考样品。选择磁铁矿是因为它可以在自然界中以非常纯净的形式发现。在具有已知成分的氧化层的样品上也验证了参考样品的选择，该氧化物层是通过溅射沉积制备的。在不使用标准参考材料（SRM）的情况下，通过重量增加法和卢瑟福背散射法对溅射氧化物层的成分进行了分析，然后将结果与通过AES深度分布分析获得的结果进行了比较。

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