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首页> 外文期刊>Applied Surface Science >Formation Of Gold Nanoparticles In Heat-treated Reactive Co-sputtered Au-sio_2 Thin Films
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Formation Of Gold Nanoparticles In Heat-treated Reactive Co-sputtered Au-sio_2 Thin Films

机译：热处理反应共溅射Au-sio_2薄膜中金纳米颗粒的形成

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摘要

In this work, formation of gold nanoparticles in radio frequency (RF) reactive magnetron co-sputtered Au-SiO_2 thin films post annealed at different temperatures in Ar + H_2 atmosphere has been investigated. Optical, surface topography, chemical state and crystalline properties of the prepared films were analyzed by using UV-visible spectrophotometry, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS) and X-ray diffractometry (XRD) techniques, respectively. Optical absorption spectrum of the Au-SiO_2 thin films annealed at 800 ℃ showed one surface plasmon resonance (SPR) absorption peak located at 520 nm relating to gold nanoparticles. According to XPS analysis, it was found that the gold nanoparticles had a tendency to accumulate on surface of the heat-treated films in the metallic state. AFM images showed that the nanoparticles were uniformly distributed on the film surface with grain size of about 30 nm. Using XRD analysis average crystalline size of the Au particles was estimated to about 20 nm.
机译：在这项工作中，研究了在Ar + H_2气氛中在不同温度下退火后的射频（RF）反应磁控管共溅射Au-SiO_2薄膜中金纳米颗粒的形成。分别使用紫外可见分光光度法，原子力显微镜（AFM），X射线光电子能谱（XPS）和X射线衍射法（XRD）技术分析了制备的薄膜的光学，表面形貌，化学状态和结晶特性。在800℃退火的Au-SiO_2薄膜的光吸收光谱显示出与金纳米粒子有关的一个表面等离子体共振（SPR）吸收峰位于520nm。根据XPS分析，发现金纳米颗粒倾向于以金属状态积聚在热处理膜的表面上。 AFM图像显示纳米颗粒均匀地分布在膜表面上，晶粒尺寸为约30nm。使用XRD分析，Au颗粒的平均晶体尺寸估计为约20nm。

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