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Search for novel amorphous alloys with high crystallization temperature by combinatorial arc plasma deposition

机译：通过组合电弧等离子体沉积寻找具有高结晶温度的新型非晶态合金

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This paper describes a combinatorial search for novel amorphous alloys with high crystallization temperatures (T_x) using combinatorial arc plasma deposition (CAPD). The CAPD technique can deposit 1089 (33 × 33) thin film samples with different compositions on a substrate at one time. These 1089 samples on the substrate are individually referred to as CAPD samples and collectively referred to as a thin film library. Thin film libraries of Ir-Zr-Fe, Ir-Zr-Al, Mo-Zr-Al, Mo-Zr-Si, Ru-Zr-Fe and Ru-Zr-Si were deposited by CAPD. The compositions and phases of the CAPD samples were measured by energy dispersive X-ray fluorescence spectrometry and X-ray diffractometry, respectively. The results revealed that each library included amorphous CAPD samples. Since it is impossible to measure the T_x, fracture strength, fracture strain and Young's modulus of the CAPD samples by conventional measurement methods, larger samples having the same compositions as the amorphous CAPD samples were fabricated by a sputtering system. Since all CAPD samples of Ir-Zr-Fe and Ir-Zr-Al were too brittle, their corresponding sputter-deposited samples were not prepared. Sputter-deposited Mo-Zr-Al, Mo-Zr-Si, Ru-Zr-Fe and Ru-Zr-Si samples with ～50 at.% Mo- or Ru-content were fabricated, and T_x and mechanical properties of these sputter-deposited samples were evaluated. All the sputter-deposited samples of Mo-Zr-Al and Mo-Zr-Si showed high T_x exceeding 973 K and as well as brittle characteristics. Ru_(50)Zr_(35)Fe_(10) samples showed high T_x exceeding 1273 K and a low fracture strength of 0.26 GPa. Samples of Ru_(51)Zr_5Si_(44) showed a high T_x of 923 K and a high fracture strength of 1.25 GPa.
机译：本文介绍了使用组合电弧等离子体沉积（CAPD）组合搜索具有高结晶温度（T_x）的新型非晶态合金的方法。 CAPD技术可以一次将1089（33×33）种具有不同成分的薄膜样品沉积在基板上。基板上的这1089个样本分别称为CAPD样本，统称为薄膜库。通过CAPD沉积了Ir-Zr-Fe，Ir-Zr-Al，Mo-Zr-Al，Mo-Zr-Si，Ru-Zr-Fe和Ru-Zr-Si的薄膜库。通过能量色散X射线荧光光谱法和X射线衍射法分别测量CAPD样品的组成和相。结果表明，每个文库均包含无定形CAPD样品。由于不可能通过常规测量方法来测量CAPD样品的T_x，断裂强度，断裂应变和杨氏模量，因此通过溅射系统制造具有与非晶CAPD样品相同组成的较大样品。由于所有Ir-Zr-Fe和Ir-Zr-Al的CAPD样品都太脆，因此未准备相应的溅射沉积样品。制作了Mo-Zr-Al，Mo-Zr-Si，Ru-Zr-Fe和Ru-Zr-Si样品，其Mo或Ru含量约为50 at。％，并制备了T_x和这些溅射物的机械性能评价沉积的样品。 Mo-Zr-Al和Mo-Zr-Si的所有溅射沉积样品均显示出超过973 K的高T_x和脆性。 Ru_（50）Zr_（35）Fe_（10）样品显示高T_x超过1273 K，低断裂强度为0.26 GPa。 Ru_（51）Zr_5Si_（44）样品显示出923 K的高T_x和1.25 GPa的高断裂强度。

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