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Investigation of growth, coverage and effectiveness of plasma assisted nano-films of fluorocarbon

机译：等离子体辅助碳氟化合物纳米膜的生长，覆盖和有效性研究

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Plasma-assisted functional films have significant potential in various engineering applications. They can be tailored to impart desired properties by bonding specific molecular groups to the substrate surface. The aim of this investigation was to develop a fundamental understanding of the atomic level growth, coverage and functional effectiveness of plasma nano-films on flat surfaces and to explore their application-potential for complex and uneven shaped nano-materials. In this paper, results on plasma-assisted nano-scale fluorocarbon films, which are known for imparting inertness or hydrophobicity to the surface, will be discussed. The film deposition was studied as a function of time on flat single crystal surfaces of silicon, sapphire and graphite, using microwave plasma. X-ray photoelectron spectroscopy (XPS) was used for detailed study of composition and chemistry of the substrate and coating atoms, at all stages of deposition. Atomic force microscopy (AFM) was performed in parallel to study the coverage and growth morphology of these films at each stage. Combined XPS and AFM results indicated complete coverage of all the substrates at the nanometer scale. It was also shown that these films grew in a layer-by-layer fashion. The nano-films were also applied to complex and uneven shaped nano-structured and porous materials, such as microcellular porous foam and nano fibers. It was seen that these nano-films can be a viable approach for effective surface modification of complex or uneven shaped nano-materials. (c) 2005 Elsevier B.V All rights reserved.
机译：等离子辅助功能膜在各种工程应用中具有巨大潜力。可通过将特定分子基团键合至基材表面来定制它们以赋予所需的性能。这项研究的目的是对平坦表面上的等离子纳米膜的原子能级增长，覆盖率和功能有效性有一个基本的了解，并探索其在复杂和不规则形状的纳米材料中的应用潜力。在本文中，将讨论在等离子体辅助的纳米级碳氟化合物薄膜上的结果，该薄膜可赋予表面惰性或疏水性。使用微波等离子体研究了在硅，蓝宝石和石墨的平坦单晶表面上成膜随时间变化的函数。 X射线光电子能谱（XPS）用于在沉积的所有阶段详细研究基材和涂层原子的组成和化学性质。平行进行原子力显微镜（AFM），以研究这些膜在每个阶段的覆盖率和生长形态。 XPS和AFM的综合结果表明，所有基材均被纳米级完全覆盖。还表明这些膜以逐层的方式生长。纳米膜还被应用于复杂和不规则形状的纳米结构和多孔材料，例如微孔多孔泡沫和纳米纤维。可以看出，这些纳米膜可以是对复杂或不规则形状的纳米材料进行有效表面改性的可行方法。 （c）2005 Elsevier B.V保留所有权利。

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