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Structural and optical properties of ZnO thin films deposited on quartz glass by pulsed laser deposition

机译:脉冲激光沉积在石英玻璃上沉积的ZnO薄膜的结构和光学性质

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ZnO thin films with typical c-axis (0 0 2) orientation were successfully deposited on quartz glass substrates by pulse laser ablation of Zn target in oxygen atmosphere at a relatively low temperature range of 100-250 degrees C. The structural and optical properties of the films were studied. In photoluminescence (PL) spectra at room temperature, single ultraviolet emission (without deep-level emission) was obtained from ZnO film deposited at the temperature of 200 degrees C. This was attributed to its low intrinsic defects. (c) 2005 Elsevier B.V. All rights reserved.
机译:具有典型c轴(0 0 2)取向的ZnO薄膜通过在氧气气氛中100-250摄氏度的较低温度下通过脉冲激光烧蚀Zn靶材成功地沉积在石英玻璃基板上。电影被研究了。在室温下的光致发光(PL)光谱中,从在200摄氏度的温度下沉积的ZnO薄膜获得了单紫外线发射(无深层发射)。这归因于其固有缺陷少。 (c)2005 Elsevier B.V.保留所有权利。

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