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Combinatorial synthesis of thin film libraries for microwave dielectrics

机译：微波电介质薄膜库的组合合成

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The short innovation cycles in communication technology require the development and optimization of high-performance dielectrics for passive integration, utilized, e.g., in band pass filters, antennas, or dielectric resonators. Applying combinatorial methods offers the advantage to accelerate the discovery of more efficient microwave dielectrics and to investigate the effects of a variety of dopants on the dielectric properties. In the present study, libraries consisting of chemically diverse thin films are produced by chemical solution deposition. A sol-gel precursor set was developed consisting of precursor solutions for different elements, such as Ba, Ti, W, and Sr, which convert to the corresponding oxides by annealing. These precursor solutions are mixed in various ratios by pipetting robots and are then deposited on structured substrates followed by calcination and sintering. The influence of different parameters on the film quality such as the type of precursor used, their miscibility with each other, the thermal processing, and the technique used to pre-structure the wafer is discussed.
机译：通信技术中较短的创新周期要求开发和优化用于无源集成的高性能电介质，例如在带通滤波器，天线或电介质谐振器中使用。应用组合方法的优点是可以加速发现更有效的微波电介质，并研究各种掺杂物对电介质性能的影响。在本研究中，通过化学溶液沉积产生由化学上不同的薄膜组成的库。开发了一种溶胶-凝胶前体组，该组由用于不同元素（例如Ba，Ti，W和Sr）的前体溶液组成，这些元素通过退火转化为相应的氧化物。通过移液机器人将这些前体溶液以各种比例混合，然后沉积在结构化基材上，然后进行煅烧和烧结。讨论了不同参数对薄膜质量的影响，例如所用前驱体的类型，它们彼此的可混溶性，热处理以及用于预构造晶片的技术。

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