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Structure and composition of carbon-nitride films grown by sub-ps PLD

机译：亚ps PLD生长的氮化碳膜的结构和组成

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摘要

CN_x (0.01 < x < 0.20) films have been deposited by ablating a graphite target in N_2 atmosphere with a hybrid dye/excimer laser system delivering pulses of 500 fs duration at 248 nm. Changes in surface composition and morphology of the as grown films, as a function of N_2 pressure (between 0.3 and 60 Pa), laser pulse energy (maximum 10 mJ), and spot area are reported, by means of X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM), respectively. In the pressure domain investigated, the nitrogen content increases as a power function. While both pulse energy and spot area influence the chemical composition of the films, the same fluence achieved by using different spot sizes results in films of different N content. Deposition of micrometer sized particulates is apparently suppressed, while sub-micron features of typically circular shape are present over the smooth film surface.
机译：通过在N_2气氛中用混合染料/受激准分子激光系统烧蚀石墨靶，沉积了CN_x（0.01

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