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Compositional and thickness distribution of carbon nitride films grown by PLD in the target plane

机译：PLD在目标平面上生长的氮化碳膜的成分和厚度分布

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摘要

The peculiarities of a novel off-axis pulsed laser deposition configuration are reported in which the material is collected on substrates placed in the target plane. Carbon nitride films have been grown by KrF excimer laser ablation of a rotating graphite target in nitrogen atmosphere. The thickness distribution of films, recorded along the axes of symmetry of the laser spot, revealed that the increase of pressure from 1 to 40 Pa led to (ⅰ ) thicker films, (ⅱ) gradually more confined deposits and (ⅲ) a transition from elliptical to circular distribution. X-ray photoelectron spectroscopy evidenced the reduced nitrogen content of the off-axis films as compared to their traditional on-axis counterparts. Nevertheless, the chemical structure of the deposits was identical in the two geometries. In the off-axis films the further away the deposition location is from the laser spot the more nitrogen can be incorporated into the film with concomitant increase in the oxygen content, the latter pointing to possible changes in the film microstructure.
机译：报道了新型离轴脉冲激光沉积配置的特点，其中材料收集在放置在目标平面中的基板上。氮化碳膜是通过在氮气气氛中用KrF准分子激光烧蚀旋转的石墨靶材来生长的。沿激光光斑对称轴记录的薄膜厚度分布表明，压力从1 Pa增加到40 Pa导致（ⅰ）较厚的薄膜，（ⅱ）逐渐形成更多的受限沉积物，并且（from）转变为椭圆形到圆形分布。 X射线光电子能谱证明离轴膜的氮含量比传统的轴上膜降低。然而，在两个几何形状中，沉积物的化学结构是相同的。在离轴薄膜中，沉积位置离激光点越远，越多的氮可以伴随着氧气含量的增加而被掺入薄膜中，后者表明薄膜微观结构可能发生变化。

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