An investigation of sidewall adhesion in MEMS

W. Robert Ashurst; M.P. de Boer; C. Carraro; R. Maboudian

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An investigation of sidewall adhesion in MEMS

机译：MEMS中侧壁附着力的研究

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Adhesion or stiction is a key problem in surface micromachining technology, affecting the reliability of most MEMS. To date, the quantitative analysis of the phenomenon has been limited to in-plane adhesion. Since many micromechanisms involve contacts between sidewalls, we have designed a microinstrument to measure sidewall adhesion. Here, we describe the design, modeling, results and problems encountered with this first generation of sidewall adhesion devices.

机译：粘附力或附着力是表面微加工技术中的关键问题，会影响大多数MEMS的可靠性。迄今为止，对该现象的定量分析仅限于平面内粘附。由于许多微机制涉及侧壁之间的接触，因此我们设计了一种微仪器来测量侧壁的附着力。在这里，我们描述了第一代侧壁粘合装置的设计，建模，结果和遇到的问题。

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来源
《Applied Surface Science》 |2003年第5期|p.735-741|共7页
作者
W. Robert Ashurst; M.P. de Boer; C. Carraro; R. Maboudian;
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作者单位

Department of Chemical Engineering, University of California, Berkeley, CA 94720, USA;

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原文格式 PDF
正文语种 eng
中图分类应用物理学;
关键词
adhesion; MEMS; sidewall; stiction;

机译：附着力;MEMS;侧壁;静摩擦;

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1. An easy-to-fabricate improved microinstrument for systematically investigating adhesion between MEMS sidewalls [J] . N. Ansari, W.R. Ashurst Applied Surface Science . 2011,第24期

机译：一种易于制造的改进型微仪器，用于系统地研究MEMS侧壁之间的附着力
2. Observation of nanoscale adhesion, friction and wear between ALD Al2O3 coated silicon MEMS sidewalls [J] . Buja Federico, Fiorentino Giuseppe, Kokorian Jaap, Nanotechnology . 2015,第25期

机译：观察ALD Al2O3涂层的硅MEMS侧壁之间的纳米级附着力，摩擦和磨损
3. Investigating the effect of varying coating thickness on the surface roughness and adhesion forces of MEMS surfaces utilizing a theoretical and experimental approach [J] . Kolahdoozan Mojtaba, Kiani Ali, Heidari Pedram, Applied Surface Science . 2019,第JULa1期

机译：使用理论和实验方法研究变化的涂层厚度对MEMS表面的表面粗糙度和附着力的影响
4. First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls [C] . Buja Federico, Kokorian Jaap, Sumant Anirudha V., IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2014

机译：导电超纳米晶金刚石MEMS侧壁的首次粘合测量
5. Investigation of Adhesion Layer for Hybrid Metal and Glassy-Carbon (GC) Microelectromechanical Systems (MEMS). [D] . Moghadasi, Ali. 2016

机译：混合金属和玻璃碳（GC）微机电系统（MEMS）粘合层的研究。
6. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes [O] . Mehmet Ozdogan, Shahrzad Towfighian 2016

机译：带有侧壁电极的双轴扭转MEMS镜的非线性动力学行为
7. Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes [O] . Mehmet Ozdogan, Shahrzad Towfighian 2016

机译：具有侧壁电极的双轴扭转mEms镜的非线性动力学行为

An investigation of sidewall adhesion in MEMS

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