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首页> 外文期刊>Applied Surface Science >Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering
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Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

机译：反应磁控溅射沉积新型纳米复合WNx涂层的组织与性能

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摘要

Novel nanocomposite tungsten nitrides (WNx) coatings were deposited on cemented carbides by direct current (dc) reactive magnetron sputtering under different deposition powers. The microstructures and related mechanical properties of the coatings were carefully investigated. At deposition power of 2 kW, the WNx coating is entirely composed of well-developed columnar fcc-W2N grains, showing the strongest (2 0 0)(W2N) preferred orientation, whereas the coatings deposited at other conditions are composed of nanocomposite structures consisting of nanocrystalline bcc-W and fcc-W2N embedded into amorphous-phase matrix, showing weak (2 0 0)(W2N) and (1 1 1)(W2N) preferred orientations. Moreover, there is an orientation relationship between bcc-W and fcc-W2N: (-1 0 -1)(W)//(1 1 -1)(W2N) + 2.1 degrees and [-1 1 1](W)//[0 1 1](W2N). The amorphous films with thickness of several nanometers always occur in a special periodic multilayer structure or in the large angle grain boundaries of bcc-W. Such amorphous films are resulted from the intensive bombardment of sputtered W atoms, which leads to the densification of the coating and further restrains the diffusion of W atoms for crystallization growth. Moreover, strong ion bombardment can interrupt the W-W metallic bond, and further restrain crystallization growth. Therefore, the nanocomposite structure shows the higher hardness and fracture toughness when compared with columnar W2N coating mainly due to the fine-grained strengthening and solution strengthening.
机译：在不同的沉积功率下，通过直流（dc）反应磁控溅射将新型纳米复合氮化钨（WNx）涂层沉积在硬质合金上。仔细研究了涂层的微观结构和相关的机械性能。在2 kW的沉积功率下，WNx涂层完全由发达的圆柱状fcc-W2N晶粒组成，表现出最强的（2 0 0）（W2N）择优取向，而在其他条件下沉积的涂层则由纳米复合结构组成嵌入非晶相基质中的纳米晶bcc-W和fcc-W2N的结构，显示出弱（2 0 0）（W2N）和（1 1 1）（W2N）优先取向。此外，bcc-W和fcc-W2N之间存在取向关系：（-1 0 -1）（W）//（1 1 -1）（W2N）+ 2.1度和[-1 1 1]（W） // [0 1 1]（W2N）。厚度为几纳米的无定形膜总是以特殊的周期性多层结构或bcc-W的大角度晶界出现。这种无定形膜是由溅射的W原子的强烈轰击产生的，这导致涂层的致密化，并进一步限制了W原子的扩散以进行结晶生长。此外，强离子轰击会打断W-W金属键，并进一步抑制结晶生长。因此，与柱状W2N涂层相比，纳米复合材料结构具有更高的硬度和断裂韧性，这主要是由于细颗粒的强化和固溶强化。

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