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首页> 外文会议>Society of Vacuum Coaters annual technical conference >A Comparative Study of Conventional Magnetron Sputter Deposited and Plasma Enhanced Magnetron Sputter Deposited Ti-Si-C-N Nanocomposite Coatings
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A Comparative Study of Conventional Magnetron Sputter Deposited and Plasma Enhanced Magnetron Sputter Deposited Ti-Si-C-N Nanocomposite Coatings

机译：常规磁控溅射沉积和等离子增强磁控溅射沉积Ti-Si-C-N纳米复合涂层的比较研究

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In this study, Ti-Si-C-N nanocomposite coatings were deposited using Conventional Magnetron Sputtering (CMS) and Plasma Enhanced Magnetron Sputtering (PEMS) techniques on Ti-6Al-4V and Custom-450, a stainless steel used in the turbine industry. The only difference between the CMS and the PEMS is that in the PEMS process a global plasma is generated using hot tungsten filaments, in addition to the magnetron plasma generated in the CMS process. During both the CMS and PEMS depositions, two magnetrons with Ti targets were used in an argon-nitrogen-trimethylsilane gaseous mixture to form Ti-Si-C-N. Then the microstructural, mechanical, and tribological properties of these coatings were studied and compared. The Ti-Si-C-N coatings deposited by both techniques have the same grain size of 5.2 ± 0.1 nm with a cauliflower-like microstructure. However, the CMS coating has a number of embedded micrometer-sized droplets and microcracks. The PEMS coating has substantially reduced the number and size of the droplets and microcracks. It has also significantly improved the mechanical and tribological properties. The surface microhardness of the PEMS coating (24.65 GPa) is twice as high as that of the CMS coating (11.77 GPa), while the effective elastic modulus of the PEMS coating (331 GPa) is 50 % higher than that of the CMS coating (215 GPa). As a result, higher H/E~* and H~3/E~(*2) values have been achieved. Finally, the PEMS coating has significantly increased the wear and erosion resistance, while reducing the coefficient of friction slightly.
机译：在这项研究中，使用常规磁控溅射（CMS）和等离子增强磁控溅射（PEMS）技术在Ti-6Al-4V和Custom-450（用于涡轮机行业的不锈钢）上沉积Ti-Si-C-N纳米复合涂层。 CMS和PEMS之间的唯一区别是，在PEMS过程中，除了在CMS过程中产生的磁控管等离子体外，还使用热的钨丝产生了整体等离子体。在CMS和PEMS沉积期间，在氩气-氮气-三甲基硅烷气体混合物中使用两个带有Ti靶的磁控管形成Ti-Si-C-N。然后研究和比较了这些涂层的微观结构，力学和摩擦学性能。通过两种技术沉积的Ti-Si-C-N涂层具有5.2±0.1 nm的相同晶粒尺寸，并具有花椰菜状的微观结构。但是，CMS涂层具有许多嵌入的微米级液滴和微裂纹。 PEMS涂层已大大减少了液滴和微裂纹的数量和大小。它还显着改善了机械和摩擦学性能。 PEMS涂层（24.65 GPa）的表面显微硬度是CMS涂层（11.77 GPa）的两倍，而PEMS涂层（331 GPa）的有效弹性模量比CMS涂层（331 GPa）高50％。 215 GPa）。结果，获得了更高的H / E〜*和H〜3 / E〜（* 2）值。最后，PEMS涂层显着提高了耐磨性和抗冲蚀性，同时略微降低了摩擦系数。

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