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首页> 外文期刊>Arabian Journal for Science and Engineering >Design and Analysis of Non-spiral Planar Microcoil-Based Electromagnetic Microactuator
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Design and Analysis of Non-spiral Planar Microcoil-Based Electromagnetic Microactuator

机译：基于非螺旋平面微线圈的电磁微执行器的设计与分析

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摘要

Lab-on-chip devices essentially require micropumps and valves which incorporate a microactuating mechanism to control fluid flow. In this work, a non-spiral type planar microcoil is reported for implementing an electromagnetic microactuator. The effect of variation in coil geometries on the microactuator performance is analyzed for the first time. The microcoil fabricated and characterized in this work considerably reduces the number of lithography layers, thus improving the ease of fabrication while reducing the series coil resistance. The microcoil structures are further analyzed for the microactuator performance using finite element method, and the effect of coil geometries on the electromagnetic force generated by the actuator is studied. Microfabrication and electrical characterization results of the non-spiral planar microcoils show the influence of the same on the actuator performance. A tapered square microcoil geometry is proposed to improve the outputs from the actuator.
机译：芯片实验室设备本质上需要微型泵和阀门，这些微型泵和阀门装有微致动机构来控制流体流动。在这项工作中，据报道非螺旋型平面微线圈用于实现电磁微致动器。首次分析了线圈几何形状变化对微执行器性能的影响。在这项工作中制造并表征的微线圈大大减少了光刻层的数量，从而在降低串联线圈电阻的同时提高了制造的简易性。使用有限元方法进一步分析了微线圈结构的微执行器性能，并研究了线圈几何形状对执行器产生的电磁力的影响。非螺旋形平面微线圈的微细加工和电学表征结果表明，它们对致动器性能的影响。提出了锥形方形微线圈几何形状，以改善执行器的输出。

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