• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Arabian Journal for Science and Engineering >Influence of External Input Parameters on Species Production in a Dual-Frequency Capacitively Coupled Radio-frequency Oxygen Plasma
【24h】

Influence of External Input Parameters on Species Production in a Dual-Frequency Capacitively Coupled Radio-frequency Oxygen Plasma

机译：外部输入参数对双频电容耦合射频氧等离子体中物种产生的影响

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The impact of some external input parameters on electron, ozone O_3, negative O~− and positive O~+_2 ions, metastablesinglet delta-state O_2(a~1Δ_g) molecule and atomic oxygen O formation is investigated using a numerical simulation. Aone-dimensional, self-consistent fluid model of a dual radio-frequency capacitively coupled discharge operating on pureoxygen is developed to explore the evolution of the species density profiles as functions of gas pressure p_g, driving highfrequencyf_(hf) , inter-electrode gap distance d and driving voltage waveform V_(hf) . The proposed model incorporates five mainspecies and 24 dominant reaction channels. Simulation results show that the time-averaged density profiles of electron, ozoneO_3, negative O~− and positive O~+_2 ions decrease when the gas pressure increases. However, the density of the metastablesinglet delta-state O_2(a~1Δ_g) molecule and atomic oxygen O increase when the gas pressure increases. The electron densitysignificantly increases with increased fh f until a maximum peak is reached at 40.68 MHz, and then it drops almost linearlyat frequencies greater than 40.68 MHz. However, the negative ions O− density increases over a range of frequencies from27.12 to 67.80 MHz, then it decreases slightly as fh f increases further. Therefore, when f_(hf) increases, it does enhance theproduction of the metastable O_2(a~1Δ_g) and the oxygen O atoms, whereas the O~+_2 density is decreased. It is also shownthat an increase in the inter-electrode gap distance causes a noticeably decrease in the formation of the various species inthe discharge. Furthermore, a significant increase in the atomic oxygen O and the metastable singlet delta-state _O2(a~1Δ_g)densities is displayed as V_(hf) increases. Comparisons are made with recent simulation models and experimental data, and aqualitative agreement is obtained.
机译：利用数值模拟研究了一些外部输入参数对电子，臭氧O_3，负O〜-和正O〜+ _2离子，亚稳单三角洲O_2（a〜1Δ_g）分子以及原子氧O形成的影响。建立了基于纯氧的双射频电容耦合放电的一维自洽流体模型，以探索物种密度分布随气压p_g，驱动高频f_（hf），电极间间隙距离的变化d和驱动电压波形V_（hf）。提出的模型包括五个主要种类和24个主要反应通道。仿真结果表明，随着气压的升高，电子，臭氧O_3，负O〜-和正O〜+ _2离子的时均密度分布减小。但是，随着气压的升高，亚稳态单三角洲O_2（a〜1Δ_g）分子和氧原子O的密度增加。电子密度随着fh f的增加而显着增加，直到在40.68 MHz达到最大峰值，然后在大于40.68 MHz的频率下几乎线性下降。但是，负离子O-密度在27.12至67.80 MHz的频率范围内增加，然后随着fh f的进一步增加而略微降低。因此，当f_（hf）增加时，确实会提高亚稳态O_2（a〜1Δ_g）和氧O原子的产生，而O〜+ _2密度会降低。还表明，电极间间隙距离的增加引起放电中各种物质的形成的显着减少。此外，随着V_（hf）的增加，原子氧O和亚稳态单重态δ_O2（a〜1Δ_g）的密度显着增加。与最新的仿真模型和实验数据进行了比较，并获得了定性一致性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号