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Positioning accuracy characterization of assembled microscale components for micro-optical benches

机译：用于微型光学平台的已组装微型部件的定位精度表征

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摘要

Purpose - This paper aims to deal with the measurement of positioning accuracies of microscale components assembled to fabricate micro-optical benches (MOB). Design/methodology/approach - The concept of MOB is presented to explain how to fabricate optical MEMS based on out-of-plane micro-assembly of microcomponents. This micro-assembly platform includes a laser sensor that enables to measure the position of the microcomponent after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets. Findings - The measurement system provides results with maximum deviation smaller than ± 0.005°. Based on this measurement system and micro-assembly procedure displayed in the article, it is shown that it is possible to obtain a positioning accuracy up to 0.009°. Originality/value - These results clearly show that micro-assembly is a possible way to fabricate complex, heterogeneous and 3D optical MEMS with very good optical performances.
机译：目的-本文旨在处理组装成微型光学工作台（MOB）的微型组件的定位精度的测量。设计/方法/方法-提出了MOB的概念，以解释如何基于微组件的平面外微组件制造光学MEMS。该微型装配平台包括一个激光传感器，该激光传感器能够在微型装配后测量其位置。显示测量设置和步骤，并将其应用到多个微型组件集上。结果-测量系统提供的结果最大偏差小于±0.005°。根据本文中显示的该测量系统和微装配程序，可以达到最高0.009°的定位精度。原创性/价值-这些结果清楚地表明，微组装是制造具有非常好的光学性能的复杂，异构和3D光学MEMS的一种可能方法。

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