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C-N thin films prepared by ion beam sputtering

机译：离子束溅射制备的C-N薄膜

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Liu and Cohen calculated the modulus and structural properties of a hypothetical β-C_3N_4 compound by an empirical model and an ab initio calculation. Their calculation results show that the metastable covalent compound, with modulus close to the diamond, should have superhardness, good thermal conductivity and high thermal stability. Therefore, much attention has been paid to synthesizing this new superhard materials by employing numerous experimental techniques. Wixom only got some diamond particles by using shock compression of nitrogen-containing organic materials. Maya et al. presented no evidence for the existence of nitrogen bonded with carbon by pyrolysis of several organic compounds. Reactive magnetron sputtering resulted in amorphous carbon nitride thin films with small volume fraction of nanocrystallites. Recently, Niu et al. reported that carbon nitride thin films containing β-C_3N_4 nanocrystallites were prepared by laser ablation of graphite in the presence of atomic nitrogen, the content of nitrogen in the films can be 40%. Gouzman et al. have demonstrated that nitrogen implantation into graphite in low-energy results in a predominant population of a higher bind energy nitrogen bonding state which presents the existence of the β-C_3N_4 phase. In this note, we successfully prepared the C-N films with β-C_3N_4 phase by ion beam sputtering of graphite with discharge gas of pure N_2.
机译：Liu和Cohen通过经验模型和从头算计算了假设的β-C_3N_4化合物的模量和结构性质。他们的计算结果表明，模量接近金刚石的亚稳态共价化合物应具有超硬性，良好的导热性和较高的热稳定性。因此，已经通过采用多种实验技术来关注合成这种新的超硬材料。 Wixom仅通过对含氮有机材料进行冲击压缩而得到一些金刚石颗粒。玛雅人等。尚无证据表明存在几种有机化合物热解而与碳键合的氮的存在。反应性磁控溅射产生了具有小体积分数的纳米微晶的非晶氮化碳薄膜。最近，Niu等。据报道，通过在原子氮存在下对石墨进行激光烧蚀制备了包含β-C_3N_4纳米微晶的氮化碳薄膜，薄膜中的氮含量可达到40％。 Gouzman等。已经证明以低能量将氮注入石墨会导致大量的较高结合能的氮键合状态，这表明存在β-C_3N_4相。在本文中，我们通过用纯N_2放电气体对石墨进行离子束溅射，成功制备了具有β-C_3N_4相的C-N膜。

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