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The MEMS Micro Loudspeaker: Concept, Technology, and Applications

机译：MEMS微扬声器：概念，技术和应用

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摘要

In the past three decades, microelectronics R&D progress has been focused on Integrated Circuit (IC) miniaturization down to nanometer dimension and System on Chip (SoC) integration, which has led to outstanding results in products and services for users. The best way to summarize this roadmap is with the Moore's Law, which is the observation that the number of transistors in a dense IC doubles about every 18 months, driving up computing power and driving down costs. In parallel to this trend, there is ever-increasing awareness, R&D efforts, and business drivers to push the development and the application of "More than Moore" (MtM) concepts that are derived from silicon technologies but do not scale with Moore's law.
机译：在过去的三十年中，微电子研发进展集中在集成电路（IC）小型化下降到纳米维度和芯片（SOC）集成的系统，这导致了对用户的产品和服务的出色结果。总结这条路线图的最佳方式是摩尔定律，这是观察到致密IC中的晶体管数量大约每18个月，驱动计算能力并降低成本。与此趋势并行，有不断增加的意识，研发努力和企业司机推动开发和应用“超过摩尔”（MTM）概念，这些概念来自硅技术，但不会与Moore的法律扩展。

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