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Two-sensor control in active vibration isolation using hard mounts

机译：使用硬质安装架进行主动隔振的双传感器控制

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摘要

To isolate precision machines from floor vibrations, active vibration isolators are often applied. In this paper, a two-sensor control strategy, based on acceleration feedback and force feedback, is proposed for an active vibration isolator using a single-axis active hard mount. The hard mount provides a stiff support while an active control system is used to get the desired isolation performance. In our previous work, we showed that a sensor fusion control strategy for active hard mounts can be used to realize three performance objectives simultaneously: providing isolation from floor vibrations, achieving a low sensitivity for direct disturbance forces, and adding damping to internal modes of the supported precision machine. In the present work, an enhanced control strategy is presented, referred to as two-sensor control. We will show that two-sensor control outperforms sensor fusion, because it has more possibilities for loop-shaping and has better stability properties. The two-sensor control strategy is successfully validated on an experimental setup.
机译：为了将精密机械与地面振动隔离开来，经常使用主动隔振器。在本文中，提出了一种基于加速度反馈和力反馈的双传感器控制策略，用于采用单轴主动硬安装的主动隔振器。硬质安装座提供了坚固的支撑，而有源控制系统用于获得所需的隔离性能。在我们之前的工作中，我们证明了用于主动式硬安装的传感器融合控制策略可用于同时实现三个性能目标：提供与地面振动的隔离，对直接干扰力的低灵敏度以及对内部模式的阻尼支持的精密机器。在本工作中，提出了一种增强的控制策略，称为双传感器控制。我们将展示两传感器控制优于传感器融合，因为它具有更多的环路成形可能性和更好的稳定性。在实验设置上成功验证了双传感器控制策略。

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