• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>International Journal of Electrochemical Science >Synergistic Effect of 2-Amino-5-(Ethylthio)-1,3,4-Thiadiazole and Chloride Ion on Cu Anodic Dissolution in a Phosphate-Based Electrolyte
【24h】

Synergistic Effect of 2-Amino-5-(Ethylthio)-1,3,4-Thiadiazole and Chloride Ion on Cu Anodic Dissolution in a Phosphate-Based Electrolyte

机译：2-氨基-5-（乙硫基）-1,3,4-噻二唑与氯离子对铜基磷酸盐在电解液中阳极溶解的协同作用

获取原文
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this work, the synergistic effect of 2-amino-5-(ethylthio)-1,3,4-thiadiazole (AETD) and chloride ion- (Cl ) in a phosphate-based electrolyte was systemically studied. The results from X-ray photoelectron- spectrometer indicate that Cl was indeed incorporated into the AETD-containing passive film.- According to extensive electrochemical and material analyses, the inhibition capability of the Cl - incorporated AETD passive film demonstrated superior corrosion resistance for Cu anodic dissolutioncompared the AETD passive film alone due to the formation of dense passive film. Additionally, the- combined of AETD and Cl in the phosphate-based electrolyte had a wide potential window within the-1 planarization efficiency and the Cu removal rate were great than 70% and 600 nm min , respectively,thus demonstrating its great potential as an electrolyte for electrochemical mechanical planarization.
机译：在这项工作中，系统研究了2-氨基-5-（乙硫基）-1,3,4-噻二唑（AETD）和氯离子-（Cl）在磷酸盐基电解质中的协同作用。 X射线光电子能谱仪的结果表明，确实将Cl掺入了含AETD的钝化膜中。-根据广泛的电化学和材料分析，掺有Cl的AETD钝化膜对铜阳极具有优异的耐腐蚀性由于形成致密的钝化膜，因此溶出度比单独的AETD钝化膜好。此外，磷酸盐基电解液中的AETD和Cl的组合在-1平面化效率内具有宽的电势窗口，并且Cu的去除率分别大于70％和600 nm min，从而证明了其作为电沉积的巨大潜力。用于电化学机械平面化的电解质。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号