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首页> 外文期刊>International Journal of Electrochemical Science >Flexible Four-in-one Micro Sensor for Reliability and 100-hour Durability Testing
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Flexible Four-in-one Micro Sensor for Reliability and 100-hour Durability Testing

机译：灵活的四合一微传感器，用于可靠性和100小时的耐用性测试

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By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one(temperature, voltage, current and flow) micro sensor on a flexible substrate. The flexible four-in-onemicro sensor use polyimide as the protective layer, owing to its high temperature resistance. This paperwill involve designing and fabricating the flexible four-in-one micro sensor. A programmable thermalshock tester and a programmable temperature and humidity tester were used to simulate the innerenvironment of the low temperature proton exchange membrane fuel cell. The calibration curvesreveal repeatability and highly linear of the flexible four-in-one micro sensor. After calibrated and itsreliability confirmed, the flexible four-in-one micro sensor will inserted into the low temperatureproton exchange membrane fuel cell for local microcosmic measurement.
机译：通过使用微机电系统（MEMS），这项工作在柔性基板上开发了柔性四合一（温度，电压，电流和流量）微传感器。柔性的四合一微传感器由于其耐高温性而使用聚酰亚胺作为保护层。本文将涉及设计和制造灵活的四合一微传感器。使用可编程热冲击测试仪和可编程温湿度测试仪来模拟低温质子交换膜燃料电池的内部环境。灵活的四合一微传感器的校准曲线显示出重复性和高度线性。经过校准并确认其可靠性后，该灵活的四合一微传感器将插入低温质子交换膜燃料电池中，以进行局部微观测量。

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