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首页> 外文期刊>IUCrJ >Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction
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Three-dimensional nanostructure determination from a large diffraction data set recorded using scanning electron nanodiffraction

机译：从使用扫描电子纳米衍射记录的大衍射数据集中确定三维纳米结构

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摘要

A diffraction-based technique is developed for the determination of three-dimensional nanostructures. The technique employs high-resolution and low-dose scanning electron nanodiffraction (SEND) to acquire three-dimensional diffraction patterns, with the help of a special sample holder for large-angle rotation. Grains are identified in three-dimensional space based on crystal orientation and on reconstructed dark-field images from the recorded diffraction patterns. Application to a nanocrystalline TiN thin film shows that the three-dimensional morphology of columnar TiN grains of tens of nanometres in diameter can be reconstructed using an algebraic iterative algorithm under specified prior conditions, together with their crystallographic orientations. The principles can be extended to multiphase nanocrystalline materials as well. Thus, the tomographic SEND technique provides an effective and adaptive way of determining three-dimensional nanostructures.
机译：开发了一种基于衍射的技术来确定三维纳米结构。该技术利用高分辨率和低剂量扫描电子纳米衍射（SEND）来获取三维衍射图样，并借助用于大角度旋转的特殊样品架。根据晶体取向和记录的衍射图样重建的暗场图像，在三维空间中识别出晶粒。在纳米晶TiN薄膜上的应用表明，可以使用代数迭代算法在指定的先决条件及其晶体学取向下重建直径为数十纳米的圆柱状TiN晶粒的三维形态。原理也可以扩展到多相纳米晶体材料。因此，层析SEND技术提供了确定三维纳米结构的有效和自适应方法。

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