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Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

机译：带有侧壁电极的双轴扭转MEMS镜的非线性动力学行为

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摘要

Nonlinear dynamic responses of a Micro-Electro-Mechanical Systems (MEMS) mirror with sidewall electrodes are presented that are in close agreement with previously-reported experimental data. An analysis of frequency responses reveals softening behavior, and secondary resonances originated from the dominant quadratic nonlinearity. The quadratic nonlinearity is an electromechanical coupling effect caused by the electrostatic force. This effect is reflected in our mathematical model used to simulate the dynamic response of the micro-mirror. The effects of increased forcing and decreased damping on the frequency response are investigated as the mirrors are mostly used in vacuum packages. The results can predict MEMS mirror behaviors in optical devices better than previously-reported models.
机译：提出了带有侧壁电极的微机电系统（MEMS）镜的非线性动态响应，该响应与先前报告的实验数据非常吻合。对频率响应的分析显示出软化行为，并且次级共振源自占主导地位的二次非线性。二次非线性是由静电力引起的机电耦合效应。这种影响反映在我们用于模拟微镜动态响应的数学模型中。由于反射镜主要用于真空包装中，因此研究了压力增加和阻尼减小对频率响应的影响。结果可以比以前报告的模型更好地预测光学设备中的MEMS反射镜行为。

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