We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4?mm?×?1.4?mm?×?0.51?mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068?mV/g/V under 5?V applied and the resolutions are 24.2, 29.9 and 25.4?g, respectively.
展开▼
机译：我们报告了压阻高g三轴加速度计，其单质量证明物由八根细光束悬挂。这种八光束设计允许高g的负载分担，防止结构破裂以及压敏电阻的对称布置。器件芯片尺寸为1.4×mm××1.4×mm××0.51×mm。实验结果表明，在施加5？V电压下，X，Y和Z轴的灵敏度分别为0.2433、0.1308和0.3068？mV / g / V，分辨率分别为24.2、29.9和25.4？g。
展开▼
