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Reaction Force Compensator for High-Speed Precision Stage of Laser Direct Imaging Process

机译：激光直接成像过程高速精密平台的反作用力补偿器

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摘要

Recently, laser direct imaging (LDI) process has become popular as a substitute for lithography in flexible printed circuit board (FPCB) manufacturing industry. However, repeated motion of the process equipment causes residual vibration in a transient state when the stage accelerates or decelerates. The supporting structure for the laser head is complex and heavy in order to increase the resonant frequency, because the residual vibration must be controlled below a certain level for the LDI process precision. If the vibration cannot be rejected, the controller needs longer settling time; therefore, the productivity is reduced. In this study, a reaction force compensator (RFC) for the granite of a precision stage in the equipment is proposed to minimize the detrimental vibration and steady state error. First, displacement is measured with a laser Doppler vibrometer (LDV) to identify the dynamic characteristics of a pneumatic isolator for the stage. Second, the compensator’s mechanism design is proposed by using a voice coil motor and capacitive displacement sensor. Third, a hybrid control algorithm combining the RFC and PID is applied to reduce the vibration. Finally, the RFC is evaluated in terms of vibration peak and steady state error. The LDI apparatus is stabilized more rapidly, because the proposed method cancels the impulsive reaction force of linear motion module immediately.
机译：近年来，激光直接成像（LDI）工艺已成为柔性印刷电路板（FPCB）制造行业中光刻术的替代方法。然而，当平台加速或减速时，过程设备的重复运动会导致瞬态残余振动。为了提高共振频率，激光头的支撑结构复杂而沉重，因为必须将残余振动控制在LDI工艺精度的一定水平以下。如果无法消除振动，则控制器需要更长的建立时间;因此，生产率降低。在这项研究中，提出了一种用于设备精密台面花岗岩的反作用力补偿器（RFC），以最大程度地减少有害振动和稳态误差。首先，用激光多普勒振动计（LDV）测量位移，以确定平台的气动隔离器的动态特性。其次，通过使用音圈电机和电容位移传感器来提出补偿器的机构设计。第三，应用了将RFC和PID结合起来的混合控制算法来减少振动。最后，根据振动峰值和稳态误差评估RFC。由于所提出的方法可以立即消除线性运动模块的脉冲反作用力，因此LDI设备可以更快地稳定下来。

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