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Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and MEMS Techniques

机译：结合金刚石车削和MEMS技术制造菲涅耳菲涅尔光学薄膜

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摘要

A novel fabrication process was proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications, which combines MEMS technologies and diamond turning technology. To prevent thin-film lens substrates from deflection during diamond turning, the thin films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure has been generated on the metal thin films by diamond turning, the backside supporting silicon substrate was selectively removed by reactive ion etching. Experimental results demonstrated that submicron level form accuracy and nanometer level surface roughness could be achieved by the proposed hybrid fabrication process.
机译：提出了一种新颖的制造工艺，该工艺结合了MEMS技术和金刚石车削技术，用于制造X射线应用的薄膜金属菲涅耳透镜。为了防止薄膜透镜基板在金刚石车削过程中发生挠曲，通过电镀在单晶硅晶片上制备薄膜。在通过金刚石车削在金属薄膜上产生菲涅耳透镜结构之后，通过反应离子蚀刻选择性地去除背面支撑硅衬底。实验结果表明，通过提出的混合制造工艺可以实现亚微米级的形状精度和纳米级的表面粗糙度。

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