Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes

Jiwang Yan; Kenta Watanabe; Yutaro Nakagawa

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Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes

机译：结合金刚石车削和光刻工艺制造菲涅耳菲涅尔光学薄膜

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摘要

A novel fabrication process is proposed for manufacturing thin-film metal Fresnel lenses for X-ray applications. This process combines diamond turning technology and photolithographic processes. To prevent thin-film lens substrates from deflection during diamond turning, films were prepared on single crystalline silicon wafers by electrolytic plating. After the Fresnel lens structure is generated on the metal thin films by diamond turning, the silicon substrate was then removed selectively by reactive ion etching. Experimental results demonstrated that the proposed hybrid fabrication process achieves submicron form accuracy and nanometer surface roughness.

机译：提出了一种新颖的制造工艺来制造用于X射线应用的薄膜金属菲涅耳透镜。该工艺结合了金刚石车削技术和光刻工艺。为了防止薄膜透镜基板在金刚石车削过程中变形，通过电镀在单晶硅晶片上制备了薄膜。在通过金刚石车削在金属薄膜上产生菲涅耳透镜结构之后，然后通过反应离子蚀刻选择性地去除硅衬底。实验结果表明，提出的混合制造工艺可实现亚微米形状精度和纳米表面粗糙度。

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来源
《International journal of automation technology》 |2013年第4期|385-390|共6页
作者
Jiwang Yan; Kenta Watanabe; Yutaro Nakagawa;
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作者单位

Department of Mechanical Engineering, Faculty of Science and Technology, Keio University 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan;

Department of Mechanical Systems and Design, Graduate School of Engineering, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan;

Department of Mechanical Systems and Design, Graduate School of Engineering, Tohoku University 6-6-01 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan;

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正文语种 eng
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关键词
Fresnel lens; photolithography; ultraprecision cutting; diamond turning; optical elements;

机译：菲涅尔透镜光刻;超精密切割;金刚石车削光学元件;

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1. Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and MEMS Techniques [J] . Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa Procedia CIRP . 2012,第2期

机译：结合金刚石车削和MEMS技术制造菲涅耳菲涅尔光学薄膜
2. Direct photolithographic deforming of organomodified siloxane films for micro-optics fabrication [J] . Ari H. O. Karkkainen, John M. Tamkin, Jeremy D. Rogers, Applied optics . 2002,第19期

机译：用于微光学制造的有机改性硅氧烷膜的直接光刻变形
3. Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes [J] . Zhang Lin, Zhou Wenchen, Naples Neil J., Applied optics . 2018,第13期

机译：通过组合高速单点金刚石铣削和精密压缩成型工艺来制造红外棚屋传感器
4. Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and MEMS Techniques [C] . Jiwang Yan, Kentaro Watanabe, Yutaro Nakagawa CIRP Conference on Process Machine Interactions . 2012

机译：通过组合钻石转动和MEMS技术制造薄膜菲涅耳光学器件
5. Photolithographic and chemical fabrication processes for three-dimensional LTCC-tape systems. [D] . Espinoza-Vallejos, Patricio Alejandro. 2001

机译：三维LTCC胶带系统的光刻和化学制造工艺。
6. Nanofocusing of hard X-ray free electron laser pulses using diamond based Fresnel zone plates [O] . C. David, S. Gorelick, S. Rutishauser, -1

机译：使用基于金刚石的菲涅耳波带片对硬X射线自由电子激光脉冲进行纳米聚焦
7. Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and MEMS Techniques [O] . Yan Jiwang, Watanabe Kentaro, Nakagawa Yutaro 2012

机译：结合金刚石车削和MEMS技术制造菲涅耳菲涅尔光学薄膜

Fabrication of Thin-Film Fresnel Optics by Combining Diamond Turning and Photolithographic Processes

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